○ Dual quartz tube : 100 mm dia. exterior tube and suspended by 80 mm dia. interior tube.
Metallic foil (Graphene Growth Substrate) will be wrapped around inside tube surface for CVD reaction.
○ Vacuum sealed flanges for dual tube, which allow reactive gases to flow between two tubes ( 10mm space ) and inert gas flow inside tube for cooling.
○ 4 gas channels controlled by 4 separate digital MFCs
○ Vacuum pump is included with KF25 adapter and pipe for plug and play
○ Sliding rail is installed on the bottom of single zone furnace, which allows for fast heating or cooling by sliding furnace from one side to the other side