Pfeiffer's ACP series dry pump with 226 L/min (3.7 L/s) vacuum rate meets the requirements of applications where clean and dry vacuum is needed, for example, when using MTI's tube furnace for PECVD or graphene CVD growth.
Feature
•No particle contamination : The frictionless pumping module is optimized to operate without internal lubricant and provides outstanding oil-free vacuum with no hydrocarbon vapor back streaming.
Without any seals between rotor and stator no particles are generated. •High reliability : The absence of wearing parts inside the pumping module allows for unsurpassed long-term stability and high reliability in even the most demanding applications. •Constant performances : The frequency converter driven motor provides constant rotational speed, thus stable pumping speed and consistent ultimate pressure are achieved all over the world. •Low maintenance cot : ACP pumps require overhaul only 20,000 hours of operation for the ACP 15 resulting in low cost of ownership. •Condensable vapor ability : High flow gas ballast ports and drainable silencers allow the ACP to pump high amounts of condensable vapors (up to 1,000 g/h of pure water vapor). •Complete accessories included for immediate use
Specification
Pumping speed
3.7 L/s
Ultimate pressure
•2.2 x 10-2 torr •Note : The ultimate vacuum level by pump may vary from chamber to chamber in terms of size and sealing condition.
Power consumption
450W at ultimate pressure and 550W at atmosphere
Ambient Temperature
12 - 40 ºC
Flange
•Flange in : KF25 •Flange out : KF16
Power Supply
110V - 240 VAC, 50/60 Hz
Max. helium leak rate
< 5 x 10-7 mbar/s
Weight
23 Kg
Dimension
514 x 190 x 27 0mm (20.2 x 7.5 x 10.6")
Accessories included
•one 1 meter long SS below with KF25 adaptor •Two qick clam for KF25
Warranty
One year
Compliance
•ELT Certification •CE Approved
Note
The ultimate vacuum level by pump may vary from chamber to chamber in terms of size and sealing condition.