Thin-Film Battery Preparation

Plasma Sputtering Coater with Three Sputtering Sources and RF/DC Power Supplies - VTC-600-3HD-LD

Plasma Sputtering Coater with Three Sputtering Sources and RF/DC Power Supplies - VTC-600-3HD-LD

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Product Name Plasma Sputtering Coater with Three Sputtering Sources and RF/DC Power Supplies - VTC-600-3HD-LD
Sale Price Call for Price
Product Code VTC-600-3HD-LD
Quantity 수량증가수량감소
Stock 자세히
상품 옵션
Power Source


VTC-600-3HD-LD is a combinatorial plasma sputtering system with three 2“ magnetron sputtering sources and three RF/DC power supplies. Such a sputtering system is capable of co-sputtering up to three different target materials and creates various composition profiles across the substrate (e.g. ternary materials for Li-ion rechargeable battery). This system is also suitable for sequential coating of multiple layer films such as ferroelectric, alloy, semiconductor, ceramic, dielectric, optical, oxide, hard, PTFE, etc.


Compact Structure

Input Power

  •      •  Single-phase 220 VAC 50 / 60 Hz
  •      •  2000 W (including a vacuum pump and water chiller)

Source Power

  •      • 
    Three sputtering power sources are integrated into one control
            box (Click picture below to see detailed specs)

    •          º  DC source: 500 W power for coating metallic materials
                 (Pic 1)
    •          º  RF source: 300 W power, 13.56 MHz frequency for
                  coating non
      -conductive materials (Pic 2)

                      -- Pic 1           -- Pic 2    

Magnetron Sputtering Head


Vacuum Chamber

  •      •  Vacuum chamber: 300 mm Dia. x 300 mm Height, made of
            stainless steel
  •      •  Viewport: Two pieces of 100 mm Dia. glass. One fixed;
            one detachable for cleaning and replacement
  •      •  Hinged type lid with pneumatic power pole allows easy target


Sample Stage

  •      •  The sample holder is a rotatable and heatable stage made of
            the ceramic heater with copper cover

  •      •  Sample holder size: 140 mm Dia. for. 4" wafer max

  •      •  Rotation speed: 1 - 20 rpm adjustable for uniform coating

  •      •  The holder temperature is adjustable from RT to 500 °C max
            (2 hr max) with accuracy +/- 1.0 °C via a digital temperature


Gas Flow Control

  •      •  Two precision mass flow controllers (MFC) are installed to allow
             inlet of two types of gases

    •          º  Flow rate: 0 – 200 mL/min & 0 - 100ml/min adjustable on the touch screen control panel

  •      •  Air inlet valve is installed for vacuum release

Vacuum Pump Station


  •      •  A mobile pump station is included. The sputtering coater
           can be placed on top of the station

  •      •  High-speed turbopump at speed 80L/S is combined with a
            two-stage mechanical pump (220 L/min) for max vacuum level
            and faster pumping speed

  •      •  Standard vacuum level connected with chamber: < 4.0E-5 Torr.

  •      •  Optional at extra cost

  •      •  If choose a 150L/S high-speed turbopump, the vacuum can
            reach 10-6 torr with the chamber 。

  •      •  For the ultra-high vacuum up to 10^-7 torr, 700S/L turbopump
             is needed

  •         150L/S high-speed turbopump        
      700L/S high-speed turbopump  

Water Chiller

  •      •  One digital temperature-controlled recirculating water chiller is
    (Click picture to see details)

    •          º  Refrigeration range: 5~35 °C
    •          º  Flow rate: 16 L/min
    •          º  Pump pressure: 14 psi


    •      •  Precise quartz Film Thickness Monitor is optional, which can be
              into the chamber to monitor coating thickness with an accuracy
              of 0.10 Å

    •      •  Precision Thin Film & Coating Analysis Systems - EQ-TFMS-LD is
              available at extra cost

    •      •  Various 2” oxide and metallic targets are available upon request
               at extra cost. Silver epoxy and copper backing plates can be
               ordered at MTI


    Overall Dimensions

        Lid closed: 48" × 28" × 32"         Lid open: 48" × 28" × 37"

    Net Weight of Coater

    •      •  160 kg

    Shipping Weight & Dimensions

    •      • 
      Total 3 Pallets
    •      •  365 lbs, 48" x 40" x 45"
    •      •  390 lbs, 48"x 40" x 49"
    •      •  210 lbs, 48" x 40"x 30"


    •      •       •  CE approval
         •  NRTLcertification is available upon request at extra cost,
               please contact our sales representative for the quote.


    •      •  One year's limited warranty with lifetime support

    Operation Instruction



    Application Note

    This coater may be placed into a standard glovebox with modification for thin-film battery research