Gas, Liquid & Solid Powder Delivery/Formation

Four Channel Gas Control System for Tube Furnaces with Precision Mass Flow Meters (MFC) and Valves - EQ-GSL-4Z

Four Channel Gas Control System for Tube Furnaces with Precision Mass Flow Meters (MFC) and Valves - EQ-GSL-4Z

기본 정보
Product Name Four Channel Gas Control System for Tube Furnaces with Precision Mass Flow Meters (MFC) and Valves - EQ-GSL-4Z
Sale Price Call for Price
Product Code EQ-GSL-4Z
Quantity 수량증가수량감소
상품 옵션
 
  •  Four Channel Gas Control System
  • The gas control system is designed for the control of 1-4 types of gases flowing through vacuum-sealed MTI tube furnaces at a low cost.  The gas control system is installed in a heavy duty mobile cart where the tube furnace can be placed on the top.  The front panel in the system has adjust valves and displays for the flow rate of gases. By combining with MTI tube furnaces, it can be used as CVD system and annealing furnace to study the gas environmental influence has on materials.
Function Item Specification
Gas Mixing System Mass Flow Controller
(Click pic for details)
Working Voltage: 185~245V/50Hz
Max. Output Power: 18W
Working Temperature: 5~45 ºC
Max. Pressure: 3x106 Pa
Accuracy: ±1% FS
Controlling Range:
Controller 1: 0~100 SCCM
Controller 2: 1~199 SCCM
Controller 3: 1~199 SCCM
Controller 4: 1~499 SCCM

Other range MFC can be customized at extra cost upon request 
Mechanical Pressure Gauge Measurement Range: -0.1~0.15 MPa (0.01 MPa/grid)
Needle Valve 316 Stainless Steel
Pipe fitting Pipe fitting: 1/4" stainless steel
12'' length 1/4" ID Nylon pipe for immediate use
Gas mixing tank Φ 80 X 120 mm
Stop valve 316 stainless steel needle valve, Φ1/4”
Dimension 600 x 600 x 650 mm
Dimension 600(L) x 600(W) x 700(H) mm 4 channel MFC with mixing tank and electronic&control panel are built in a heavy duty table with movbale wheels
Max load: 1000 Lbs
Compliance CE certified
Warranty One year limited with lifetime support