CGM-2F is a compact two-channel trace gas mixer for inert gas control in small tube furnaces, glove boxes, plasma cleaner, small PECVD system. This mixer regulates both line pressure and flow rate, and assures that you get the precise mixture at a lower cost and compact design. You can easily adapt this unit to most operations in atmospheric chambers.
SPECIFICATIONS
Floating Flow-meter
Two Floating Flow-meter with flow rate range from 16 to 160 mL/min
Mix Tank
One stainless steel mix tank built in for better gas mixing
Mechanical Pressure Gauge (mixing tank)
0 - 1.0 MPa, (0.02 MPa/grit)
Fittings & Valves
Three Pipe fittings for 1/4" pipe (nylon or stainless steel) Three vacuum needle valves made of SS304