Gas & Liquid Delivery System

Four Channel Gas Control System for CVD with Laptop PC & Control Software - EQ-GSL-4ZCC

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Product Name Four Channel Gas Control System for CVD with Laptop PC & Control Software - EQ-GSL-4ZCC
Sale Price Call for Price
Product Code EQ-GSL-4ZCC
Quantity 수량증가수량감소
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옵션 선택
 
  • Now available in Computer-Controlled configuration for greater accuracy and precision in controlling gas flow.   The gas control system is designed for controlling the mixture of gases (up to 4 types) flowing through a vacuum-sealed MTI tube furnace at low cost. The gas control system is installed in a heavy duty mobile cart for allowing a tube furnace to be placed on top. The front panel in the system has adjustment valves and displays for the gas flow rates. By combining with MTI tube furnaces, it can be used as a CVD system and annealing furnace to study the gas environmental influence has on materials.   The addition of the computer-controlled feature enables the user to monitor and precisely adjust the gas flow in all channels of this gas mixing unit. By entering the desired % F.S. into a graphical user interface, the need to rotate the analog knobs for flow rate adjustment is no longer needed. The user can choose between a range of 0 - 120% F.S. for the flow rate each of gas channel in the mixing unit.
  •  Computer-Controlled Mass Flow Controller
  •  
    (Click pic for details) 
  • Power Input
  • 185~245V 50/60Hz Single Phase
  • Power Consumption
  • 18W
  • Control Range
  • Controller 1: 0~100 SCCM
    Controller 2: 1~199 SCCM
    Controller 3: 1~199 SCCM
    Controller 4: 1~499 SCCM   Other range can be Customized range within 1-999 SCCM is available upon requestat at extra cost,
  • Accuracy
  • ±1.0% S.P. (≥35% F.S.)
    ±0.35% F.S.(<35% F.S.)
  • Repeatability
  • ±0.2% FS
  • Linearity
  • ±0.5% FS
  • Response Time
  • ≤1sec
  • Valve Rest Position
  • Normally Closed or Normally Open
  • Temperature Coefficient
  • Zero: ≤±0.05% F.S./℃
    Span: ≤±0.1% F.S.℃(≤30 SLM)
    Span: ≤±0.2% F.S.℃(>30 SLM)
  • Zero Drift
  • <0.6%F.S. per year without autozero
  • Surface Finish(Ra)
  • 25 Ra
  • Operation Temperature
  • (5~45)℃
  • Communication Interface for
    input Signal
  • Digital: RS485
    DeviceNetTM
    Analog:(0~5)VDC or (420)mA
  • Communication Interface for
    Output Signal
  • Digital: RS485
    DeviceNetTM
    Analog:(05)VDC or (420)mA
  • Power Supply
  • ±11 ~ ±16 VDC or +11 ~ +28 VDC(400mA)
  • Electronic Connector
  • D sub 9 pins male
    D sub 15 pins male
    DeviceNetTM male
  • Differential Pressure
  • (0.050.35) Mpa(≤10000SCCM)
    (0.10.35) Mpa(20000SCCM,30000SCCM)
    (0.20.45) Mpa(50000SCCM)
  • Max Pressure
  • 3 MPa
  • Leak integrity
  • 1×10-9 atm·cc / sec He(1×10-10 Pa·m3 / sec He)
  • Seals Materials
  • Viton
    Neoprene
  • Surface Chemistry
  • (EP only)
  • Fittings
  • Swagelok1/4”
  • Weight
  • 1 kg
  •  Movable Box and Others
  • Mechanical Pressure Gauge
  • Measurement Range: -0.1~0.15 MPa (0.01 MPa/grid)
  • Needle Valve
  • 316 Stainless Steel
  • Pipe fitting
  • Pipe fitting: 1/4" stainless steel
    12'' length 1/4" ID Nylon pipe for immediate use
  • Gas Mixing Tank
  • Φ80X120mm
  • Stop Valve
  • 316 stainless steel needle valve, Φ1/4”
  • Dimension
  • 600x600x650 mm
  •  Computer and Software
  • Setup and Installation
  • Pre-setup and installed for customer's plug and play
  • Software Interface
  •  User Interface-click to enlatge
  • Computer OS
  • Win7
  • Optional
  • You may choose PLC "touch-screen" as control pannel at extra cost. 
  •  Compliance & Warranty
  • All Parts are CE certified
    One Year limited warranty with lifetime support