Mini Plasma Sputtering Coater with Substrate Heater (up to 600°C) & Gold Target - GSL-1100X-SPC12H-LD

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Product Name Mini Plasma Sputtering Coater with Substrate Heater (up to 600°C) & Gold Target - GSL-1100X-SPC12H-LD
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Product Code 3288
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Item Number GSL-1100X-SPC12H-LD
 
  • GSL-1100X-SPC12H is a heatable plasma sputtering coater and designed for making metallic coatings, such as gold, platinum, Indium and silver etc, on a sample up to 40 mm diameter with 300 Angstrom thickness.    Especially for coating conductive gold film for SEM sample.    The plasma sputtering coater is shipped with all necessary accessories for immediate use, including one sputtering head with gold sputtering target (gold cathode), vacuum pump, stainless steel bellows, quick clamps and vapor trap.
  •  SPECIFICATIONS
  • Specimen chamber
  • Fused glass chamber, 100 mm Dia. x 130 mm Height
    Quartz heat insulation Shield
    Stainless steel flange
     
  • Substrate Heater
  • Built in 60 Diam. susbtrate heater (up to 600°C)
    One 30-segment programmable precision temperature controller is included with +/-1ºC accuracy (click the second picture from the left) to see detail specs.
    Recommended heating rate : 15°C/m
    Height of substrate heater is adjustable

    Sample stage

    Heat Controller back view
  • Vacuum Accessories
  • Every acessories are included for immediate use.
     ( Please click the picture left for detail )

    ○  Vane rotary vacuum pump 2L/sec ( external ) with Pirani gauge vapor trap can prevent streaming of oil get back into the vacuum chamber
    ○  Stainless steel bellows with KF16 adaptor and quick clamps & vapor trap
    ○  Two Stage Exhaust Filter  on vacuum pum to eleminate oil vapor contamination
    ○  High purity gold foil target

  • Gas Atmosphere
  • One needle valve is installed to allow Ar gas flow to achieve better plasma coating
  • Target Size
  • 4N purity Gold foil : 57 mm dia. x 0.12 mm
     (Included and pre-installed on coater)
    Optional targets are available :  Please click picture below to order Au, Ag or Pt tagets.
  • Overall Dimensions
  • L 480 mm x W 320 mm x H 150 mm
  • Shipping Weight
  • 160 Lbs with crating
  • Net Weight
  • 20 kg
  • Application Notes
  • MTI Corp. shares the most state-of-art sputter coating technology with our customer, please click the picture below to read the artical - Plasma Sputter Coating.
     For the best film strength, please use plasma cleaner to clean sample surface before coating
     
    The system requires an Ar gas tank with pressure regulator which is not included
    This model is not suitable for coating light weight metallic material such as Al, Mg and Zinc or Carbon target due to low energy.    Please consider our Megnetron-PSC or Carbon Evaporation Coating Syetem.    Click the pic bellow for detail.

    Carbon Evaporating Sys

    Megnetron sputtering

    2 in 1 system
  • Operation Instructions
  • Warranty
  • One year limited warranty with lifetime support
  • Certificate
  • certified