Gas, Liquid & Solid Powder Delivery/Formation

Compact Anti-Corrosion Three Channel Gas Mixer (16 -160 ml/m) - EQ-CGM-3F-PTFE

Compact Anti-Corrosion Three Channel Gas Mixer (16 -160 ml/m) - EQ-CGM-3F-PTFE

기본 정보
Product Name Compact Anti-Corrosion Three Channel Gas Mixer (16 -160 ml/m) - EQ-CGM-3F-PTFE
Sale Price Call for Price
Product Code EQ-CGM-3F-PTFE
Quantity 수량증가수량감소
상품 옵션
 
  • EQ-CGM-3F-PTFE is a compact three channel anti-corrosion gas mixing & delivery system, which can be put in a small fume-hood together with a tube furnace and be more safe. . All parts wetted with gas are made of PTFE (e.g. valve, pipe, mixing tank and flow-meter). It is designed for delivering corrosive gases,such as hydrogen sulfide (H2S) and hydrogen selenide ( H2Se) for CVD processing.
  •  Specifications
  • Floating meter
  • Three anti-corrosive Floating Flow-meter made of PTFE material with flowing rates of 10 - 100 mL/min
    One Mechanical Pressure Gauge (mixing tank): 0 - 1.0 MPa, (0.02 MPa/grit)
  • Valve
  • Three needle valves made of PTFE material which controls gas out-let on front panel    
  • Gas Tank
  • 500 mL gas tank made of PTFE
    Each channel gas will flow into the tank for mixing before flow-out
  • Pipe fitting
  • Pipe fitting made of PTFE and accept 1/4" pipe (nylon or stainless steel)       Three Gas Inlet fittings (from gas tanks) are Installed in right side of cart
    Two channel gases flow into a gas mixer container and one gas channel independent (please review manual for drawing)
    Two gas outlet fittings (to tube furnace) are installed in left side of cart (one for mixing gas and one independent)
    12' length 1/4" PTFE pipe is included for immediate use
  • Dimension
  • Compact size: 340Lx300Dx 180H, mm ( 13.4"x12"x7").
    Net Weight: 16 Lb
  • Shipping
  • Shipping dimension: TBD
    Shipping weight: 50 lbs
  • Warranty
  • Two years limited with life time support
  • Application Note
  • If your CVD processing involves corrosive gas, such as H2S, please consider to use PTFE flange on your tube furnace
    Also, please choose anti-corrosion dry vacuum pump instead of oil vacuum pump