Gas, Liquid & Solid Powder Delivery/Formation

Three Channels Gas Control System for Tube Furnaces with Precision Mass Flowmeters (MFC) and Valves - EQ-GSL-3Z

Three Channels Gas Control System for Tube Furnaces with Precision Mass Flowmeters (MFC) and Valves - EQ-GSL-3Z

기본 정보
Product Name Three Channels Gas Control System for Tube Furnaces with Precision Mass Flowmeters (MFC) and Valves - EQ-GSL-3Z
Sale Price Call for Price
Product Code EQ-GSL-3Z
Quantity 수량증가수량감소
상품 옵션
 
  •  Three Channels Gas Control System
  • The gas control system is designed for control of 1-3 types of gases flowing through vacuum sealed MTI tube furnaces in lower cost.  The gas control system is installed in heavy duty mobile cart where tube furnace can be placed on the top.  The front panels in the system will display flow rate with adjust valves.  Combining with MTI tube furnaces, it can be used as CVD system and annealing furnace to study gas environmental influence to materials.
Function Item Specification
Gas Mixing System Three Mass Flow Controller
Working Voltage: 185~245V/50Hz
Max. Output Power: 18W
Controlling Range:
Controller 1: 0~100 SCCM
Controller 2: 1~199 SCCM
Controller 3: 1~499 SCCM

1-999 SCCM is available upon request and Other range can be customized at extra cost, please email to mti@mtikorea.co.kr 

Working Temperature: 5~45 ºC
Max. Pressure: 3x106 Pa
Accuracy: ±1% FS
Mechanical Pressure Gauge MeasurementRange: -0.1~0.15 MPa (0.01 MPa/grid)
Needle Valve 316 Stainless Steel
Pipe fitting Pipe fitting: 1/4" stainless steel
12'' length 1/4" ID Nylon pipe for immediate use
Gas mixing tank Φ80X120mm
Stop valve 316 stainless steel needle valve, Φ1/4”
Dimension 600x600x650 mm
Mobile Table Dimension 600(L) x 600(W) x 700(H) mm 4 heavy duty wheels included . Max load: 500 Lbs