Gas, Liquid & Solid Powder Delivery/Formation

Six Channel Gas Control System for Tube Furnaces with Precision Mass Flow Meters (MFC) and Valves - EQ-GSL-6Z

Six Channel Gas Control System for Tube Furnaces with Precision Mass Flow Meters (MFC) and Valves - EQ-GSL-6Z

기본 정보
Product Name Six Channel Gas Control System for Tube Furnaces with Precision Mass Flow Meters (MFC) and Valves - EQ-GSL-6Z
Sale Price Call for Price
Product Code EQ-GSL-6Z
Quantity 수량증가수량감소
상품 옵션
 
  •  Six Channel Gas Control System
  • The gas control system is designed for the control of 1-6 types of gases flowing through vacuum-sealed MTI tube furnaces at a low cost.  The gas control system is installed in a heavy duty mobile cart where the tube furnace can be placed on the top.  The front panel in the system has adjust valves and displays for the flow rate of gases. By combining with MTI tube furnaces, it can be used as CVD system and annealing furnace to study the gas environmental influence has on materials.
Function Item Specification
Gas Mixing System Mass Flow Controller
(Click pic for details)
Working Voltage: 185~245 V/50 Hz
Max. Output Power: 18W
Controlling Range:
Controller 1: 0~100 SCCM
Controller 2: 0~100 SCCM
Controller 3: 0~100 SCCM
Controller 4: 0~100 SCCM
Controller 5: 0~100 SCCM
Controller 6: 0~100 SCCM

1-999 SCCM is available upon request and Other range can be customized at extra cost, please email to mti@mtikorea.co.kr 

Working Temperature: 5~45 ºC
Max. Pressure: 3x106 Pa
Accuracy: ±1% FS
Mechanical Pressure Gauge MeasurementRange: -0.1~0.15 MPa (0.01 MPa/grid)
Needle Valve 316 Stainless Steel
Pipe fitting Pipe fitting: 1/4" stainless steel
12'' length 1/4" ID Nylon pipe for immediate use
Gas mixing tank Φ 80 X 120 mm
Stop valve 316 stainless steel needle valve, Φ1/4”
Dimension 600x600x650 mm
Mobile Table Dimension 600(L) x 600(W) x 700(H) mm 4 heavy duty wheels included . Max load: 500 Lbs