VTC-16-3H is a CE certified compact Three Rotary Target Plasma Sputtering Coater with a touch screen digital controller, and a substrate heater capable of heating up to 400°C.
It can coat 1 - 3 types of metallic materials to samples with diameters up to 50 mm.
Three sputtering targets, Gold, Aluminum, Copper, vacuum pump, stainless steel bellows with KF25 adapters & clamps and a vapor trap are included for immediate use.
SPECIFICATIONS
Input Power
•110/ 220V AC; 50/ 60 Hz switchable for worldwide use •< 2000 W (including pump)
Output Power
•1600 VDC •50 mA max.
Specimen Chamber Size
Fused glass tube, 150 mm I.D. Dia x 150 mm Height
Heating sample stage
•One 50 mm Dia. sample stage, which can be rotated in three positions by pushing a button. •The substrate heater is built in the stage with a max. heating temperature of 500°C •PID temperature controller with +/-1°C accuracy is built in touch screen control panel
Control Panel
•6" color touch-screen control panel with PLC integration for easy operation •One panel controls all parameters, including vacuum, current, target position and substrate heating temperature
Accessories
•KF25 vacuum port with quick clamp and 600mm length stainless steel bellows •120 L/m Rotary Vane Vacuum Pump (external) is included •Vapor trap eliminates the oil mist •Stainless steel bellows with KF25 adapter and clamps •High purity gold foil target •The system requires a Ar gas tank with pressure regulator, which is not included
Gas Atmosphere
One needle valve installed to allow Ar gas inlet to achieve better plasma coating
•One year limited with lifetime support •CE certified
Sputter Coating Knowledge
•MTI Corp. shares state-of-art sputter coating technology with our customer, please click the picture below to read the article - Plasma Sputter Coating. •For the best film strength, please use plasma cleaner to clean the sample surface before coating - Click on Lower Left Picture for more details •For coating light weight metallic materials such as Al. Zinc and graphite, the sputtering coating is not efficient due to low energy, please consider using a thermal evaporating coater - Click on Lower Right Picture for more details
Application Notes
The system requires an Ar gas tank with a pressure regulator that are not included