CVD / PECVD Coating Furnace

Compact PECVD Tube Furnace with 2"OD Quartz tube and vacuum pump, Max.1200C, - OTF-1200X-50-PE-S-1

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Product Name Compact PECVD Tube Furnace with 2"OD Quartz tube and vacuum pump, Max.1200C, - OTF-1200X-50-PE-S-1
Sale Price Call for Price
Product Code OTF-1200X-50-PE-S
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  • OTF-1200X-50-PE-S is a affordable and compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system.    This system consists of: a 500W RF plasma generator, a 2" O.D split tube furnace with vacuum flange and fittings. and a double stage rotary vane pump with a movable working table.    This system can be updated to advanced model with optionals.    It is ideal tool for the researcher to make innovation under limited budget

    ○  Lower temperature processing compared to conventional CVD.
    ○  Film stress can be controlled by high/low frequency mixing techniques.
    ○  Control over stoichiometry via process conditions.
    ○  Can do a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon
    ○  (a-Si:H) deposition.

  •  Specifications
  • Split Tube furnace
  • Input power : 208 – 240 V AC,   1.2 kW
    1200 °C Max. working temperature for < 60 minutes
    1100 °C Max for continuous heating
    High purity quartz tube 2" OD x 1.7" ID x 31.5" Length
    30 segments programmable precision digital temperature controller
    8" (200 mm), single zone. 2.3" (60 mm) (+/- 1 °C) @ 1000 °C The following picture shows the temp. distribution across the heating zone, please click to enlarge.
      Temp. distribution profile   Pic of furnace in operation  
  • Plasma RF Generator  
  • Output Power :  5 - 500 W adjustable with ± 1 % stability
    RF frequency :  13.56 MHz   ± 0.005 % stability
    Reflection Power :  200 W max.
    Matching :  Automatic
    RF Output Port :  50 Ω,   N-type,   female
    Noise :  < 50 dB.
    Cooling :  Air cooling.
    Power :  208 - 240 VAC,   50/60 Hz
  • Vacuum Flange and Fittings
  • Vacuum flange set is made of stainless steel 304.
    Left flange assembly includes a digital pirani gauge, 1/4 O.D tube fitting, a needle valve and a on-off protection valve.
    Right flange assembly includes a KF-25 vacuum port, a KF-25 right angle valve, a releasing valve, two KF-25 quick clamp, a flange support and a KF-25 vacuum bellows.
    An anti-corrosive, gas-type independent digital pirani capacitance diaphragm guage is intalled in left flange.    Click the pic below to view detail spec.
    Please check the following pics to view detail information
     Left Flange  Right Flange  Anti-corrosive Gauge  
  • Vacuum Pump
  • AC 220 V   50 Hz   1/2 HP   375 W
    2 Liter /S   or   120 liter/m
    Oil trap (inlet) and exhaust filter (outlet) are installed.
    Max. vacuum :  10-2 torr
     Exhuast Filter w/ clamp  Vacuum pump  
    Please click here to view detail spec of the vacuum pump 
  • Product Dimensions
  • Overall Dimensions : 1500 mm x 600 mm x 1200 mm
     (all system, L x W x H)
    Net weight : 350 lbs
    Shipping weight : 480 lbs
  • Warranty
  • One year limited warranty with lift time support  (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
  • Compliance
  • CE Certified
    Temperature controller is MET and CE Certified      
  • Operation Instruction
  • Warning
  • The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure)
    MTI reserves right to modify PECVD design at any time without notice, but promise that quality will meet the specifications above