CVD / PECVD Coating Furnace

Compact PECVD System with 3" Quartz Chamber up to 400°C - GSL-1100X-PECVD

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Product Name Compact PECVD System with 3" Quartz Chamber up to 400°C - GSL-1100X-PECVD
Sale Price Call for Price
Product Code GSL-1100X-PECVD
Quantity 수량증가수량감소
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옵션 선택
  • This is a miniature PECVD furnace with 3" diameter x 16" L quartz chamber, internal heating coil, two channel gas mixing and vacuum pump.  The completed system is placed on mobile cart for easy operation.  The sample heating zone of plasma furnace can be heated to 400°C via a programmable temperature controller for the research of various film depositions.
  • Plasma Generator    
  • Plasma Generator Power: 115V or 230VAC, 50/60 Hz, < 100W
    Output Frequency: 13.56 MHz
    Three RF power levels: 7.2W. 10.5W and 18W selectable
    Chamber size: quartz tube, 3"OD x 2.7"ID x 16" Length
    Stainless steel flange on two ends of quartz tube, which allow vacuum up to 10-2 torr by mechanical pump
    Sample will be placed inside quartz tube and back of plasma generator. See drawing below to review structure
  • Slidable Flange 
  • The sliding flange is installed on the mobile table for easy loading and unloading the sample.
    The sample can be placed inside the heating coil in order to get efficient heating process and ideal uniformity. Please click the pic for details.
  • Heater Coil &
    Temperature Controller
  • One 50mm OD x 40mm ID x 70mm coil heater is located on the side sliding , which can heat sample up to 400°C
    One quartz tube of 2" ID x 75mm L shall be covered the coil heater to reduce heating loss
    One high purity alumina boat (50L x 20W x 20H mm) is included, and Sample can beplaced inside alumina boat
    30 segments programmable digital temperature controller is located on bottom of plasma generator with +/-1°C accuracy
     Heater Power requirement:
    Power Requirement: AC 220V, 500W Max
      Coil heater Quartz protective tube  
      Temp. Controller Alumina boat  
  • Two Channels Gas Flow
  • Two Floating Flow-meter with flow rate range from 10 to 100 mL/min
    Three Mechanical Pressure Gauge (mixing tank): -0.1-0.15 MPa, (0.01 MPa/grit)
    Vacuum needle valves made of SS304
    Three Pipe fittings for 1/4" pipe (nylon or stainless steel)
    Compact size: 340Lx300Dx 180H, mm ( 13.4"x12"x7").
    Net: Weight: 14 lbs.
    No power required
  • Vacuum and gas fittings 
  • The standard vacuum accessories include:   A pair of 3" flange with KF-25 pump connector, one 1/4" swagelok tube connector  and two needle valves
    Two KF-25 vacuum bellows (1meter Length)  and three KF-25 quick clamps 
    One digital vacuum gauge 

    1.  Many inert gases can be chosen for plasma, such as N2, Ar, Air and Mixed gas depended on what kind material will be treated . (not included in the package)
    2.  No flammable gas shall be used for the plasma generator
    3.  You shall adjust chamber pressure and gas flowing rate to ensure plasma glowing to reach sample area in back of tube

  • Heavy duty Mobile cart 
  • One 600L x 600W x 600H, mm two shelves heavy duty mobile cart is included.
    CVD system is placed on top of the cart
  • Dimension
  • Plasma Generator: 8.5" H x 10" W x 8" D
    Temperature Controller: 4"H x 10"W x 8"D
    Mobile table and flange: 600 x 600 x 1000mm
    Shipping package: 16" x 16" x 28"
  • Weight
  • 70 lb (include vacuum pump)
  • Warranty
  • One year limited (no warranty for the quartz tube)
  • Certificates
  • CE Certified
  • Warning
  • The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 MPa  (absolute pressure)