Plasma Enhanced CVD Tube F...

PECVD Split Tube Furnace (2''-3.14'' OD) with 4 Channels Gas Delivery & Vacuum System (Max.1200C 10E-3 torr) - OTF-1200X-4CLV-PE-ULOTF-1200X-50-4CLV-PEOTF-1200X-80-4CLV-PE

PECVD Split Tube Furnace (2''-3.14'' OD) with 4 Channels Gas Delivery & Vacuum System (Max.1200C 10E-3 torr) - OTF-1200X-4CLV-PE-UL
OTF-1200X-50-4CLV-PE
OTF-1200X-80-4CLV-PE

기본 정보
Product Name PECVD Split Tube Furnace (2''-3.14'' OD) with 4 Channels Gas Delivery & Vacuum System (Max.1200C 10E-3 torr) - OTF-1200X-4CLV-PE-UL
OTF-1200X-50-4CLV-PE
OTF-1200X-80-4CLV-PE
Sale Price Call for Price
Quantity 수량증가수량감소
상품 옵션
 
  •  Product Options
Select by tube size Item Number
with 2" (50mm) OD x 1.7" ID x 71" L tube OTF-1200X-50-4CLV-PE
with 3.14" (80mm) OD x 2.83" ID x 71'' L tube OTF-1200X-80-4CLV-PE
  • OTF-1200X-4CLV-PE is a CE certified compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 500W RF plasma source, 2" or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high quality mechanical pump.    The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nano-wire from a gas state (vapor) to a solid state, and benefits :
  • ○  Lower temperature processing compared to conventional CVD.
    ○  Film stress can be controlled by high/low frequency mixing techniques.
    ○  Control over stoichiometry via process conditions.
    ○  Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.

  •  Specifications
  • Split Tube furnace

  • 1200oC Max. working temperature for < 60 minutes
    1100oC Max for continuous heating
    30 segments programmable precision digital temperature controller
    440 mm length single heating zone and 150 mm length constant temperate zone
    High purity quartz tube optional from
     ( click optional bar to choose )

    ○  2" OD x 1.7" ID x 48" Length
    ○  3.14" OD x 2.83" ID x 48'' Length

    One pair of vacuum sealed flange with valves
    Input power : 208 – 240 V AC input, single phase at max. 4 KW
    Two zone split furnace -OTF1200X-II is optional at extra cost 
  • Plasma RF Powersupply
  • Output Power : 5 -500 W adjustable with ± 1% stability
    RF frequency : 13.56 MHz ±0.005% stability
    Reflection Power : 200 W max.
    Matching : Automatic
    RF Output Port : 50 Ω, N-type, female
    Noise : < 50 dB.
    Cooling : Air cooling.
    Power : 208 - 240 VAC, 50/60 Hz
    Note : This RF power supply can accept 50 - 80 mm Max. quartz tube by changing flange
  • Anti-corrosive Pressure Gauge

  • 3.8 x 10-5 to 1125 Torr measurement range
    Anti-corrosive, gas-type independent
    High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection

    ○  Fast atmospheric detection eliminates waiting time and shortens process cycle
    ○  Easy to exchange plug & play sensor element

    Click pic to view detal spec.
  • Optional Oiless Pump
  • Please order the oiless pump for zero contamination :
  • Mass Flow meters
  • Four precision mass flow meters (0.02% accuracy) with digital display are installed on the bottom case to control gas flow rate automatically.
    MFC 1 : Gas flow range from 0 ~ 100 sccm
    MFC 2&3 : Control range from 0 ~ 200 sccm
    MFC 4 : Control range from 0 ~ 500 sccm
    One gas mixing tank is installed on bottom case with liquid release valve
    4 stainless steel needle valves is installed on left side of bottom case to control 4type gases mixing manually
    Gas inlet fitting : four 1/4NPS
    Gas outlet fitting : four 1/4NPS
  • Optional
  • Four channel Gas flow can be integrated into one PLC with touch screen panel to control at extra cost
  • Overall dimensions
  • Furnace : 550 mm (L) x 380 mm (W) x 520 mm (H)
    2 Bottom Mobile case together : 1200 mm (L) x 1200 mm (W) x 1200 mm (H)
    Net weight : 220 lbs
    Shipping weight : 350 lbs
  • Warranty
  • One year limited warranty with lift time support (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
  • Compliance
  • CE Certified
    All electric components ( >24V) are UL / MET / CSA certified, not including the gas mixing system, vacuum system and plasma generator
    The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.( please click marks below to learn details )
     
     
  • Warning
  • The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure)
    MTI reserves right to modify PECVD design at any time without notice, but promise that quality will meet the specifications above
  • Shipping Dimensions
  • Pallet #1 : 48" x 40" x 60"
    Pallet #2 : 48" x 40" x 40"
    Pallet #3 : 48" x 40" x 40"
    Pallet #4 : 48" x 40" x 40"
  • Total Shipping Weight
  • 500 kg (1100 lbs)