OTF-1500X-80-II-4CV-PE is three zone 1500ºC PE-CVD tube furnace system consists of 500W RF plasma source, 80Dx 1600mm mullite tube furnace with an integrated channel precision mass flow meter with gas mixing tank, and a high quality oil-less vacuum pump.
Such a PE-CVD furnace is a new tool to grow nano-wire or graphene or SiC coating. :
SPECIFICATIONS
Three Zone 1500°C Split Tube furnace
•Max 1500ºC , and for 1400ºC continuous heating •Three programmable precision digital temperature controllers with 30 segments. •Three separately controlled Heating Zones :
○ 200 mm / each ( included 20 mm spacing ) ○ Total zone length : 600 mm
•Mullite ceramic made in USA . Size: 84 O.D x 73 I.D x 1500 mm L •Input power : 208 – 240 V AC input, single phase at max. 6.6 KW. •Click Picture below left to see detail specs. •Vaccum sealed flanges are included for immediate use. One end flange has a quartz wendow, sothat plasma glowing can be seen through the window ( click picture below right to see details )
Plasma RF Power Supply
•Output Power : 5 -500W adjustable with ± 1% stability. •RF frequency : 13.56 MHz ±0.005% stability. •Reflection Power : 200 W max. •Matching : Automatic •RF Output Port : 50 Ω, N-type, female •Noise : < 50 dB. •Cooling : Air cooling. •Power : 208 - 240 VAC, Single Phase, 50/60 Hz
Anti-corrosive Pressure Gauge
•3.8 x 10-5 to 1125 Torr measurement range •Anti-corrosive, gas-type independent •High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection •Fast atmospheric detection eliminates waiting time and shortens process cycle •Easy to exchange plug & play sensor element •Click pic to view detal spec.
Oil-less Vacuum Pump Station and Valves
•Pfeiffer's High Speed ( 226L/min) Oil-less Dry Vacuum Pump, 10E-3 Torr Limit is installed inside the heavy duty mobile cart •KF25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve for customer's plug and play •10E-2 Torr vacuum can be achieved inside processing tube
Mass Flow meters & Gas Mixing Station
•Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control gas flow rate automatically.
One gas mixing tank is installed on bottom case with liquid release valve.
○ MFC 1 : Gas flow range from 0 ~ 100 sccm ○ MFC 2&3 : Control range from 0 ~ 200 sccm ○ MFC 4 : Control range from 0 ~ 500 sccm
•Gas inlet fitting : four 1/4NPS. •Gas outlet fitting : four 1/4NPS. •Power : 185 - 220 VAC 50/60 Hz •4 stainless steel needle valves are installed on the left side of bottom case to manually control the mixing of 4 gas types. •Four channel gas flows are integrated into one PLC with touch screen panel to control
Temperature Control
•Three precision digital temperature controllers to control three heating zone independently •PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time. •Built in overheating & broken thermocouple protection. •Over temperature protection and alarm allows for operation without attendant(s). •+/- 1 ºC temperature accuracy. •Three K type thermocouples (one for each zone). •RS485 Communications Port.
•Optional :
○ The furnace may be operated by PC by installing a control module.
Please order a MTS-02 control module at extra cost. ○ If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
Overall Dimensions
•Furnace : 550 x 380 x 520 mm •Sliding Rail : dual rail with 1750 mm length •Two Adjoined Bottom Mobile Cases : 1200 x 1200 x 1200 mm. •Net weight : 220 Lbs. •Shipping weight : 1200 lbs.
Warranty
One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).
Compliance
•CE Certified •UL / MET / CSA Certification is available upon request, additional charges will apply •Temperature controller is MET and CE Certified
Application Notes
•Tube furnaces are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure). •* Vacuum pressures may only be safely used up to 1200°C •Click here to learn How to set up quartz/ ceramic tube and vacuum flange for MTI Tube furnace. •MTI reserves the right to modify its PE-CVD design at any time without notice, but promises quality in future designs meet and exceed the specifications above.
