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Plasma Enhanced CVD Tube F...

 
  2. Tube Furnaces (1- 7 Zones)
  3. CVD & PECVD & Hydrogen Tube Furnaces...
  4. Plasma Enhanced CVD Tube F...
 
 
PECVD Tube Furnace (50 mm OD) with Pre-Heater and Controled Sliding Mechanism - OTF-1200X-50-II-PE-MSL

PECVD Tube Furnace (50 mm OD) with Pre-Heater and Controled Sliding Mechanism - OTF-1200X-50-II-PE-MSL

기본 정보
Product Name PECVD Tube Furnace (50 mm OD) with Pre-Heater and Controled Sliding Mechanism - OTF-1200X-50-II-PE-MSL
Sale Price Call for Price
Product Code OTF-1200X-50-II-PE-MSL
Quantity 수량증가수량감소
상품 옵션
 
  • OTF-1200X-50-II-4CV-PE-SL is a dual zone PE-CVD tube furnace system which consists of 500W RF plasma source, speed controlled slidable mechanism, a pre-heater for sublimating the solid material and a high quality oil-less vacuum pump.    Such a PE-CVD furnace is a new tool to grow nano-wire and for CVD coating of a wide range of material with the following benefits :

  • ○  Lower temperature processing is required compared to the conventional CVD
    ○  High heating & cooling rate using sliding furnace
    ○  Dual heating zone to create thermal gradient up to 500ºC
    ○  1100ºC Max. working temperature in tube furnace
    ○  1100ºC Max. working temperature in pre-heater for heating vapor phase or evaporating solid materials

  •  SPECIFICATIONS
  • Dual Zone Split Tube furnace

    (Click thumbnails to see detailed specs)
  • •Max 1100ºC for continuous heating
    •Two programmable precision digital temperature controllers with 30 segments.
     
    •Two separate controlled Heating Zones

    ○  200 mm length for each heating zone
    ○  400 mm total in heating length
    ○  250 mm constant central temperature heating area if both zones were heated at the same temperature
    ○  500 ºC max temperature difference between two zone with thermoblocks in between

     
    •High purity quartz tube : 2" (50 mm) OD x 1.7" ID x 80" Length - Optional
    •Input power : 208 – 240V AC input, single phase at max. 4 KW
  • Plasma RF Power Supply
  • •Output Power : 5 -500W adjustable with ± 1% stability.
    •RF frequency : 13.56 MHz ±0.005% stability.
    •Reflection Power : 200 W max.
    •Matching : Automatic
    •RF Output Port : 50 Ω, N-type, female
    •Noise : < 50 dB.
    •Cooling : Air cooling.
    •Power : 208 - 240 VAC,   Single Phase,   50/60 Hz
  • Pre-heating furnace
  • •Small tube furnace with 200mm length single heating zone
    •Max. temperature : 1100ºC
    •30 segment programmable temperature control
    •Vapor go through the heater first before get in RF Plasma generator.
    •Also can put solid material in the heater for evporation and mixing with vapor phase.
  • Anti-corrosive Pressure Gauge
  • •3.8 x 10-5 to 1125 Torr measurement range
    •Anti-corrosive, gas-type independent
    •High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
    •Fast atmospheric detection eliminates waiting time and shortens process cycle
    •Easy to exchange plug & play sensor element
    •Click pic to view detal spec.
  • Sliding mechanisium
  • •Sliding rail and screw are built in bottom furnace, which can move from one side to another as program to achieve faster heatong or cooling.
    •Sliding speed is adjustable from 0 - 70 mm/s
  • Heating & Cooling Rates
  • •RS485 port and software are installed and allow remote control temperature profile by PC ( not included, customer can order one from here  )
    •In order to achieve Max.heating rate, the user must preheat furnace to desired temperature , then slide the furnace to the sample zone of the tube
    •In order to achieve the Max. cooling rate, push the heated furnace from hot zone to cold zone
    Heating Rate Cooling Rate
    15°C/sec (RT - 150°C); 15°C/sec (1000 - 950°C);
    10°C/sec (150°C - 250°C); 10°C/sec (950°C - 900°C);
    7°C/sec (250°C - 350°C); 7°C/sec (900°C - 850°C);
    4°C/sec (350°C - 500°C); 4°C/sec (850°C - 750°C);
    3°C/sec (350°C - 550°C); 2°C/sec (750°C - 600°C);
    2°C/sec (550°C - 650°C); 1.5°C/sec (600°C - 500°C);
    1°C/sec (650°C - 800°C); 1°C/sec (500°C - 400°C);
    0.5°C/sec (800°C - 1000°C); 0.5°C/sec (400°C - 300°C);
  • Optional
  • •Two - Four precision mass flow meters (0.02% accuracy) with digital displays are available as optionals, which can replace the bottom case to control gas flow rate automatically with the system.    Please click picture below left to choose one at your budget.
    •Four channel gas flows can be integrated into one PLC with touch screen panel to control at extra cost
     
  • Overall Dimensions
  • •Furnace : 550 x 380 x 520 mm
    •Sliding Rail : dual rail with 1750 mm length
    •Two Adjoined Bottom Mobile Cases : 1200 x 1200 x 1200 mm.
    •Net weight : 220 Lbs.
    •Shipping weight : 1200 lbs.
  • Warranty
  • One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).
  • Compliance
  • •CE Certified
    •UL / MET / CSA Certification is available upon request,
     additional charges will apply
    •All electric parts are is MET and UL Certified
     
  • Application Notes
  • •Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure).
    •Vacuum limit definition for all quartz tube furnaces : * Vacuum pressures may only be safely used up to 1000°C
    •Click here to learn  How to set up quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
    •MTI reserves the right to modify its PE-CVD design at any time without notice, but promises quality in future designs meet and exceed the specifications above.
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