Single Zone Tube Furnace with 6" - 8.5" Quartz tube and Hinged Type Vacuum Flanges (1100 ºC , 24" heating zone) - GSL-1100X-XX-S-UL series GSL-1100X-6-S-UL GSL-1100X-8.5-S-UL
기본 정보
Product Name
Single Zone Tube Furnace with 6" - 8.5" Quartz tube and Hinged Type Vacuum Flanges (1100 ºC , 24" heating zone) - GSL-1100X-XX-S-UL series GSL-1100X-6-S-UL GSL-1100X-8.5-S-UL
GSL-1100X-XX-S-UL is a ready-to-pass UL/CSA (UL61010 or SPE1000 certification) furnace.
It is single heating zone and adapts to various sizes of quartz tube (6" or 8.5" outside diameter).
Heating temperature is up to 1100°C.
The vacuum flanges with fittings are included.
It is widely used for materials or chemical lab to sinter materials and anneal semiconductor wafers under vacuum or other gases condition.
Furnace is controlled by an intellegent temperature controller with accuracy +/-1°C and 30 programmable segments.
SPECIFICATIONS
Furnace structure
•Double layer steel casing. •Four cooling fans are buit inside to keep temperature of outside case < 60ºC •High purity alumina fibrous insulation for max energy saving.
Thermal Block Placement
Input voltage
208 - 230VAC Single phase
power
8 kW (50 Amps Air Breaker is required)
Heating element
NiCrAl Resistance Wire
Working Temperature
•Max. heating temperature : 1100°C •Continuous working temperature : 400 -1050°C •Max. heating/cooling rate : 20°C/min •Typical temperature profile at 800°C (click picture below to see detail)
Heating zone
•Total heating zone length : 600 mm (24'') •constant temperature zone : 200 mm at the center (with +/-1°C)
Temperature controller
•One Precision digital controller with PID function and 30 segments programmable •Secondary temperature monitor has function of protection from over-temperature and broken thermocouple •K type thermocouple •Temperature accuracy : +/-1°C •Software and PC interface module is available at extra cost
Vacuum & Fitting Ports
•One pair of stainless steel vacuum seal flange with hinged type ( see picture below ) •One Digital Vacuum Gauge - EQ-CVM-221, two stainless steel needle valves & 1/4" hose fittings, KF25 vacuum port and 1/4'' feedthrough. Vacuum pressure limit : depended on vacuum pump. (Usually 10-2 torr by mechanical pump).
•Two Quartz tube blocks are included. •Two air cooling fans to keep flange temperature beow 70°C •Water cooling flange is available upon request at extra cost
Cooling
Two 20 mm air cooling fans help dissipate heat of the flange.
Product dimension
1000 L x 680 W x 920 H mm
Net weight
250 Kg
Shipping dimension
60" x 60" x 55"
Shipping weight
350 Kg
Warranty
One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
Certificate
•CE Certified •All electric components ( >24V) are UL / MET / CSA certified •The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. （ please click marks below to learn details)
Application Notes
•The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure) •Attention : Due to the high pressure gas output from the gas cylinder, it is necessary to install the gas pressure regulator with it to reduce the output pressure, avoid overpressurizing the furance chamber and ensure a safe operation.Click here to learn the installation of a gas regulator. •Vacuum limit definition for all quartz tube furnaces : * Vacuum pressures may only be safely used up to 1000°C •The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
