VTC-16-3HD-LD is a CE certified compact three rotary target plasma sputtering coater with a touch screen digital controller,and a substrate heater capable of heating up to 500 °C. It can coat 1- 3 types of metallic materials to sample with the diameter up to 50 mm. Three sputtering targets: gold, silver, copper are included for immediate use. (Updated on Aug, 21th, 2015: add shield / without pump)
SPECIFICATIONS:
Input Power
• Single-phase 220 VAC, 50 / 60Hz
• 700 W (including vacuum pump)
• For using 110 VAC, we will include a transformer for you. Please select the voltage in the Product Options
Output Power
• 1600 VDC
• 40 mA max
Vacuum Chamber
• Vacuum chamber: 150 mm ID x 165mm OD x 150 mm H, made of high purity quartz
• Sealing flange made of stainless steel with flat O-ring
º Or a turbopump for vacuum up to 1.0E-5 Torr (Click Pic #3 to order)
• The vacuum pump can be plugged into the power outlet on the left of coater for automatic control
Dimensions
440 mm L × 330 mm W × 455 mm H
Net Weight
• 50 kg
Operation Instructions
Compliance
• CE approval
• NRTL certification is NOT available temporary.
Warranty
• One year limited with lifetime support
Application Notes
• For the best film-substrate adhesion strength, please clean the substrate surface before coating:
º Ultrasonic cleaning (Click the picture below to order) with the following sequential baths - (1) acetone, (2) isopropyl alcohol - to remove oil and grease. Blow dry the substrate with N2, then hot bake in vacuum to remove absorbed moisture
º Plasma cleaning (Click the picture below to order) may be needed for surface roughening, surface chemical bonds activation, or additional contamination removal
º A thin buffer layer (~5 nm), such as Cr, Ti, Mo, Ta, could be applied to improve adhesion of metals and alloys
• A two-stage pressure regulator (not included) should be installed on the gas cylinder to limit the output pressure of the gas to below 0.02 MPa for safe usage. Please use > 5N purity Ar gas for plasma sputtering
• HIGH VOLTAGE! Sputtering heads connect to high voltage. For safety, the operator must shut down the equipment before sample loading and target changing operations
• This model is not suitable for coating light metallic material such as Al, Mg, Zn, Ni, etc. due to low energy. Please consider our magnetron sputtering coater or thermal evaporation coater. Click pictures below for detail
