Connection |
• Molecular pump with KF40 to T type of Vacuum Tube and KF25 to Vacuum Gauge- • Vacuum gauge with KF25 port to install to T -tube
- • Right angle high vacuum valve with KF40 port, which connects between T- vacuum tube and SS
vacuum bellows - • 600 mm length SS vacuum bellows with KF40 port to connect to furnace flange
- • One KF40 to KF25 adapter is included to connect the pump to MTI's furnace which has KF25 port
on flange - • Please click the picture left to see detailed information:
|
Start-up Time | 2 Min. |
Working Range | From 750Torr to <7.5 E-8 Torr (1E5Pa ~ <1E-5Pa) |
Backing Pump's
Pumping Speed | 0.9m^3/H (15L/min) at 50Hz and 1.0m^3/H (16.6L/min) at 60Hz
|
Turbo Pump's Pumping
Speed
|
• Nitrogen N2 33 L/s- • Helium He 39 L/s ( 2340L/minute)
- • Hydrogen H2 32 L/s
For customer's reference:
1. Please go to bigger pump HVS-3 for bigger volume over 10L in volume, this pump is too small to vacuum
MTI's tube or other chambers over 10L
2. The station's total pumping speed can not be simply equal to the Backing Pump Speed + Turbo Pump
Speed, see below table for vacuum rate reference
Time
( Minute(s) )
|
Pressure (Torr)
|
Time ( Minute(s) |
Pressure (Torr) |
0
|
760 (Atmosphere)
|
5 |
1.37 x 10^-2 |
1
| 15
| 6 | 1.29 x 10^-2 | 2
| 2.70 x 10^-2 | 15 | 6.7 x 10^-3 | 3
| 1.66 x 10^-2 | 180 | 1.05 x 10^-5 |
|
Current | 4A max. |
Mains Connection | 90-132 V/ 185-265V (Universal) |
Weight | 15 Kg |
Shipping Dimensions | 40" x 20" x 30" (L x W x H) |
Shipping Weight | 70 lbs |
Warranty |
One year manufacturer warranty （ The damage caused by misuse not included ) Improper use will cause
all claims for liability and warranties to be forfeited. Improper use is deemed to from those mentioned
below:
- • Pumping of corrosive or explosive media.
- • Pumping of condensing vapors.
- • Pumping of liquids.
- • Pumping of dust.
- • Operation with improper high gas throughput.
- • Operation with improper high fore-vacuum pressures.
- • Operation with the improper gas mode.
- • Operation with improper high levels of insulated heat input.
- • Venting with improper high venting rates.
- • Use of the vacuum pump to generate pressure.
- • The operation of the devices in areas with ionizing radiation.
- • Operation in potentially explosive areas.
- • The operation of the devices in systems where the turbopumps are subjected to im-pact-like stress
and vibrations or the effect of periodically occurring forces. - • The use of accessories or spare parts, which are not named in this manual.
|
Operations Manual |
|
Application Notes |
• To protect the environment & human health, please use Traps & Filters to minimize exhaust. - • To protect vacuum pump from damage by condensed vapors or small particles, please connect a
cold trap or particle trap to the pump foreline ( click on the pictures below for details ). - • MTI keeps the pump in inventory for fastest delivery in the US, see below picture MTI is doing
batch test in the lab:
  
- • Silicon O-ring vacuum flange (for quartz tube and ceramic tube) achieves vacuum pressure up to
1E-5 torr.
To obtain higher vacuum pressure (1E-6 and 1E-7torr), consider using the CF type flange.
Please check our CF flange processing tube here. - • Service for the turbo pumps is recommended every 4 years under conditions with light gas loads.
|
Compliance |
•  TUV Certified
- • CE Approved
|
