RTP Furnaces

 
 
 

Compact RTP Furnace with 4" Quartz Tube & Digital Vacuum Gauge up to 1100ºC - OTF-1200X-4-RTP-UL

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Product Name Compact RTP Furnace with 4" Quartz Tube & Digital Vacuum Gauge up to 1100ºC - OTF-1200X-4-RTP-UL
Sale Price Call for Price
Product Code 822
Quantity 수량증가수량감소
Item Number OTF-1200X-4-RTP-UL
 

  • OTF-1200X-4-RTP-UL is a CE certified compact rapid thermal processing tube furnace with a 4" I.D. processing quartz tube and vacuum flanges.    It is designed for annealing semiconductor wafers or solar cells with diameters up to 3".    OTF-1200X-4-RTP is heated by 8 units of 1KW halogen light with a max. heating rate of 50ºC/second.    30 segment precision temperature controller with +/-1ºC accuracy is built into the furnace to allow for heating, dwelling, and cooling at various steps.    RS485 port and control software are included to make monitoring the temperature profile via PC while simultaneously running furnace possible.
  •  SPECIFICATIONS
  • Furnace Structure
  • Double layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
    High purity fibrous alumina insulation for maximum energy saving.
  • Power Input
  • 208 - 240 AC, 50/60 Hz single phase, 9 KW Max. (> 60A breaker required)
  • Heating Elements
  • 8 pcs 1Kw Halogen light tube,
     (Dia. = 10 mm,   L = 300 mm,   Heated Length = 200 mm)
    Standard working life : 2000 hrs.  ( depends on heating rate )
    The Halogen light tube is consumable.
     Please click picture left to order spare one
  • Heating Zone
  • 12" length with 4" constant temperature zone within +/-5ºC uniformity
  • Working Temperature
  • 1100ºC Max. for < 10 minutes
    800ºC Max. for < 120 minutes
    600ºC Max. for Continuous
  • Max. Heating Rate
  • 50ºC/sec
  • Cooling Rate
  • Max. Cooling : 60ºC/min (Under vacuum : 200 mtorr), 117ºC/min (under atmospheric pressure)
    Lowest Cooling : 10 ºC / minute
  • Thermocouple
  • K type, the head of the thermocouple touches the Aluminum Nitride sample holder from underneath
  • Temperature Controller
  • PID automatic control via  SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
    30 programmable segments for precise control of heating rate, cooling rate and dwell time.
    Please click here to learn why SCR is more accurate than SSC
     (Solid state relay). 

    Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.
    Over temperature protection and alarm allows for operation without attendant(s).
    +/- 1 ºC temperature accuracy.
    RS485 Communications Port.
    PC Control :

    ○  A MTS-02  control module  is included for PC control on this furnace.
    ○  The new version of PC module is now compatible with Lab View 05/08/2014
    ○  A laptop PC can be ordered for    together with the furnace.    We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping.    For more information please click here. 

     
     
  • Quart Tube & Sample Holder
  • Quart Tube Size : 4.33" O.D x 4.05" I.D x 16.2" Length.
    One 3" diameter AlN sample holder for annealing samples up to 3" dia. AlN has very high thermal conductivity which provides the best temperature uniformity in the sample area.
    The sample holder is removable from the flange for using the RTP furnace with other purposes.
  • Vacuum Flange
  • KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves and water cooling jacket.
    Only requires water cooling in long running times at temperatures > 600oC.
    Circulating water rate : 0.5 m3 /hr.
    Slide-out flange provides an easier way of loading, unloading the samples and other specific process needed. Insert-able thermal-couple for accurate measurement.
  • Water Cooling Jacket
  • Cooling water is required.
    Please make sure the flow rate of cooling water is ≥ 10 L/min, water temp. < 25ºC;    pressure > 25 PSI.
    We suggest using the EQ-KJ5000 Series recirculating water chiller  as a cooling system (please order separately at related products below) to save water.
    Warning : This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise O-ring may melt.
  • Flow-meter
  • One flow meter is installed on the front panel for adjusting gas flow from 16 - 160 ml/min
  • Vacuum Gauge
  • Digital vacuum gauge with a measurement range from 10-4 to 1000 Torr is installed on the furnace.
  • Vacuum Pressure & Gas Fitting
  • Pressure can reach 50 mtorr by using mechanical vacuum pump with KF25 adapter
    Pressure can reach 10-4 torr by molecular pump with KF25 adapter
  • Dimensions
  • Flange closed : 760 mm (L) X 330 mm (W) X 530 mm (H)
    Flange opened : 1200 mm (L) X 330 mm (W) X 530 mm (H)
     (click to enlarge the picture)
  • Net Weight
  • 70 kg  (150 lbs)
  • Warranty
  • One year limited manufacturer warranty with lifetime support
    (Consumable parts such as processing tubes, o-rings and halogen lamps are not covered by the warranty, please order replacements at related products below).
  • Compliance
  • CE Certified
    All electric components ( >24V ) are UL / MET / CSA certified
    The furnace is ready to pass UL(UL61010), CSA or TUV certification on customer side at extra cost. ( please click marks below to learn details )
     
     
  • Optional
  • You may combine the RTP furnace with high vacuum station or gas livery system as vacuum furnace or CVD system.    Click pictures below to see details
    For achieving faster cooling rates (< 10ºC/second), you may choose RTP furnace with sliding rail.    Please click picture below to see details.
     
  • Application Notes
  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure).
  •  STANDARD PACKAGE
Item No. Description Quantity Quick Links
EQ-CVM-211 Digital Vacuum Gauge Up to 10-4 Torr 1
EQ-KF-Valve-D25 Vacuum Ball Valve with Dual KF-D25 port 1
EQ-MTS02 Temperature PC Control System 1
RT36-00 Fuse of 63 Amps 2
RT14-20 Fuse of 4 Amps, 2
RTP-ACC-01 Sample Holder for RTP furnace 1
AIN-Holder Aluminum Nitride Substrate for RTP Furnace's Sample Holder 1
EQ-QZTube-RTP Quartz Tube: 4.33" O.D x 4.05" I.D x 16.2" Length for RTP Tube Furnace 1
RTP-ACC-02 Quartz heat shield disk 4 pcs
  20ft.(6m) polyurethane tube O.D. 12mm I.D. 8mm W.P. 100PSI 1
  High Temperature Silicone Rubber On ring
(6 pcs are installed)
9
EQ-RTP-Halogen-light Halogen light 8
  water hose connector 2
  A pair of Vacuum flange 1
 
EQ-KF-Clamp-D25 Quick Clamp with Rubber O-Ring for KF-D25 Vacuum adapter 2
  K-Type Thermocouple 1
 
  •  OPTIONAL HIGH VACUUM PACKAGE
  • In order to achieve better vacuum, we strongly suggest using KF25 adapter with stainless steel vacuum pipe (up to 50 mtorr).    Please order upgrade accessories from the table below.
Description Quantity links
Vacuum Pump, Two Steps Rotary Vane High Speed Vacuum Pump(226 L/m) with Two Stage Exhaust System & KF-D25 Adaptor (110 V or 220 V) 1
Vacuum bellows with KF-D25 adaptor (1 m) 1
Quick Clamp with Rubber O-Ring for KF-D25 Vacuum adapter 1