Furnace Structure | • Double layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
- • One set of sliding rails is installed which allows furnace move from
one side to the other side automatically at variable speeds using the control knob.
- • Vacuum flanges and the digital vacuum gauge are installed for
immediate use.
|
Power | 9KW |
Voltage | AC 208-240V Single Phase, 50/60 Hz |
Max. Temperature | • 1000°C (<1 hour) - • 800°C (<2 hours)
- • 600°C (continuous)
Note: RTP furnaces should not be heated for long durations due to thin refractories.
|
Temperature Accuracy | +/ - 2°C |
Max. Heating Rate | 50 ºC/s |
Max. Cooling Rate | Cooling Rate from 900~200C:
8.3°C/sec (900 - 600°C); 4.4°C/sec (600°C - 500°C); 2.8°C/sec (500°C - 400°C); 1.6°C/sec (400°C - 300°C); 0.9°C/sec (300°C - 200°C);
|
Process Tube Size | High purity fused quartz tube Ø4" OD x 1400mm L |
Sliding Rails / Table | • Dual sliding rails made of Cr plated steel- • Sliding rail length: 1200 mm
- • Driven by DC motor
|
Sliding Control
| Automatic sliding is controlled by the temperature controller. When the heating program is finished, the furnace will slide from right to left at the set speed. Air fans will blow heated area to achieve fast cooling.
- • Sliding Range: 340mm
- • Sliding Speed: 0-70 mm/s; adjustable
|
Heating Elements
| 8 pcs Paralleled Infrared Heating ( 1200w each)
|
Thermocouple | K type, 1/4" Dia x 24" length
|
Temperature Controller
| • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.- • Built-in overheating & thermocouple broken protection.
- • Over temperature protection and alarm allows for operation without
attendant(s).
- • +/- 1 ºC temperature accuracy.
- • RS485 Communications Port.
- • PC Control:
- º An MTS-02 control module is included for PC control on
this furnace.
- º The new version of PC module is now compatible
with Lab View 05/08/2014
- º A laptop PC can be ordered for $500 together with the
furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping. For more information please click here.
|
Vacuum Flanges
| Stainless steel vacuum flanges are installed on both ends of the tube.
Right flange:
- • Hinge-type flange for easy sample loading
- • 1/4"diameter feedthrough for inserting K-type thermal couple
- • Needle valve with barb gas fitting is built in
Left flange: - • Digital vacuum gauge is included
- • KF25 right angle valve is installed for connecting to a vacuum
pump - • Needle valve for vacuum release is included
|
Vacuum Level
| Limited by vacuum pump
- • 10^-2 torr can be achieved by mechanical pump
- • 10^-4 torr can be reached by molecular pump
Vacuum pump is not included, please order separately at related products section
|
Flow Meter | One flow-meter is built in with range: 16-160 ml/min
|
Dimensions
| • 460 x 330 x 520 mm ( furnace only)
• 1800 x 450 x 680 mm ( furnace + sliding) • (click to enlarge the picture)
|
Net Weight | ~ 80 Kg
|
Shipping Package Size
| 74" x 39" x 45" |
Shipping Weight | 300 lbs
|
Warranty | One year limited manufacturer's warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order replacements at related products below). |
Laptop, software & WiFi Control(Optional)
| |
Compliance | • CE Certified- • All electric components ( >24V) are UL / MET / CSA certified
- • The furnace is ready to pass TUV(UL61010) or CSA certification
at extra cost. ( please click marks below to learn details )
|
Application Notes
Click here to learn the installation of a gas regulator
| • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure).
- • Attention: A two-stage pressure regulator must be installed
on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
- • The flow rate for gasses should be limited to < 200 SCCM (or 200
ml/min) for reducing thermal shocks to the tube
- • Vacuum limit definition for all quartz tube furnaces: * Vacuum
pressures may only be safely used up to 1000°C
- • Click here to learn How to set up quartz/ ceramic tube and vacuum
flange for MTI Tube furnace.
- • Quartz tubes should be replaced after every 10th use to ensure
the best performance.
- • Samples should never be placed on the tube directly; please order
crucibles and boats from here.
- • After CVD, the graphene must be transferred from the metal
catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low.
|
Operation Instructions
|
|