CVD Furnaces for Graphene & 2D Materials

1200°C Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for TCVD - OTF-1200X-S-50-DFSL

1200°C Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for TCVD - OTF-1200X-S-50-DFSL

기본 정보
Product Name 1200°C Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for TCVD - OTF-1200X-S-50-DFSL
Sale Price Call for Price
Product Code OTF-1200X-S-50-DFSL
Quantity 수량증가수량감소
Stock 자세히
상품 옵션
Upgrade to Eurotherm Temperature Controllers (Dual zone)

OTF-1200X-S-50-DFSL is  a dual slidable furnace on the rail. It is a tool for thermal CVD with 2" ODx55"L Quartz tube & flanges and max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C/min.  Optional motorized sliding, MFC gas delivery and RF Plasma generator are available to build a flexible TCVD system easily at low cost.


Furnace Structure

  •      •  Both furnaces are double layer steel structure with 1200°C max.
            working temperature
  •      •  Each Furnace has 200mm heating zone and 60 mm long constant
            temperature zone
  •      •  One pair of sliding rails are installed on bottom of furnace, which
            allows furnace to be
    manually moved from side to side with max
            sliding distance 400 mm.

  •      •  Vacuum flanges is installed  for immediate use.

Power of furnace

 2.5 KW in total
Voltage AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required

Max. Temperature

1200°C (<1 hour)

Continuous Temperature


Heating & Cooling Rates

  Heating Rate:

 15°C/sec (RT - 150°C);
 10°C/sec (150°C - 250°C);
  7°C/sec (250°C - 350°C);
  4°C/sec (350°C - 500°C);
  3°C/sec (350°C - 550°C);
  2°C/sec (550°C - 650°C);
  1°C/sec (650°C - 800°C);
0.5°C/sec (800°C - 1000°C);
Cooling Rate:

15°C/sec (1000 - 950°C);
10°C/sec (950°C - 900°C);
7°C/sec (900°C - 850°C);
4°C/sec (850°C - 750°C);
2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);

1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);

The max heating and cooling rate is achieved by pre-heat one side of processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not.

Heating Zone Length

200mm( ~8")  for each furnace

Constant Temperature Zone

60 mm (+/-1°C @ 400-1200°C)

Heating Elements

Fe-Cr-Al Alloy doped by Mo

Processing Tube Size

High purity fused quartz tube

Size:  50mm O.D x 44mm I.D x1400 mm Length

Temperature Controller

  •      •  Two furnaces are PID automatic control with 30 programmable
             segments for precise control of heating rate, cooling rate and
             dwell time.

  •      •  Built-in over temperature alarm and protection allows for operation
            without an attendant.
  •      •  Two K-type thermal couples are included.

  •      •  Optional:  
    •          º  The furnace may be operated by PC by installing
                 control module. Please order an MTS-02 control module 
                  at extra cost.

    •          º  If you order the PC control module together with the
                  furnace, we will install and test it before shipping. We
                  recommend you to order a computer (laptop) from us to
                  avoid software installation problems. For more
                  information please
      click here.

Temperature Accuracy

+/ - 1°C

 Vacuum Flanges

  •      •  Stainless steel vacuum flanges with a vacuum gauge ( click
            picture bottom left to see details) are installed on both ends of
            the tube with heavy duty support.
  •      •  Optional flange with a KF25 vacuum port and digital vacuum
            gauge is available at extra cost. ( click picture bottom right to see

Sliding Rails / Table

  •      •  Double sliding rail made by Cr-plated steel
  •      •  Sliding length: 1200 mm
  •      •  Two slide stopping clamps are included for holding the position
            of the furnaces.

 Vacuum Level

  •      •  Limited by pump ( pump is not included, click on pictures to order )
    •          º  10E-5 torr can be achieved via molecular pump
    •          º  10E-2 torr can be achieved via a mechanical pump.

Optional for upgrate

  •      •  Motorized sliding is available upon request ( please click bottom
            left picture )
  •      •  1-9 chaanel gas mixing and delivery moudles is availle ( click the
            picture 2nd picture in below to order )
  •      •  100W - 500W  RF plasma generator for plasma enhanced
            processing is available upon request ( click picture bottom right
            to see detail ). This module allows you build your own Plasma
            Enhanced Thermal CVD system



  •      •  Furnace: 340 x 300 x 400 mm
  •      •  Total:1600 x 430 x 500 mm ( furnaces + sliding )
  •      •     

 Net Weight

~ 80 Kg

Shipping Package Size

70" x 45" x 45" (inch)

Shipping Weight

300 lbs


One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

Laptop, software & WiFi Control(Optional)

  •      •  Brand new laptop with Microsoft Window 10 and Microsoft Office
            2013 (30 days free trial) for immediate use.
  •      •  Labview Based Temperature Control System (EQ-
     enables user to edit temperature profile, manage heat-
            treatment recipe, record and plot data for MTI furnaces.

  •      •  A wireless remote control provides up to 300 meters operating
  •      •  Above features are available upon request at an extra cost
            (up to $1,000). Please contact us for more information.
  •      •  Note:
            The software is only compatible with MTI’s Yudian Temperature



  •      •  CE Certified
  •      •  All electric components ( >24V) are UL / MET / CSA certified
  •      •  The furnace is ready to pass TUV(UL61010) or CSA certification
            at extra cost.
     ( please click marks below to learn details )


Application Notes

Click here to learn the installation of a gas regulator

  •      •  Tube furnaces with quartz tubes are designed for using under
            vacuum and low pressure <  
    0.2 bar / 3 psi / 0.02 MPa

  •      •  Attention: A two-stage pressure regulator must be installed
            on gas cylinder to limit the pressure to below 3 PSI for safe
    Click here to learn the installation of a gas regulator.

  •      •  The flow rate for gasses should be limited to < 200 SCCM
            (or 200 ml/min) for reducing thermal shocks to the tube
  •      •  Vacuum limit definition for all quartz tube furnaces: * Vacuum
            pressures may only be safely used up to 1000°C

  •      •  Click here to learn How to set up quartz/ ceramic tube and
            vacuum flange for MTI Tube furnace

  •      •  After CVD, the graphene must be transferred from the metal
            catalyst to another substrate for most applications. By using
           graphene transfer tape
    , the residue can be low.


  •      •  Fast sample cooling can be achieved by sliding the heating
            chamber away. Please wear protective gears such as heat
            resistant suit & gloves if you intend to do so.

Operation Instructions