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3 Rotary Target Plasma Sputtering Coater Including 3 Targets - VTC-16-3HD-LD

3 Rotary Target Plasma Sputtering Coater Including 3 Targets - VTC-16-3HD-LD

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Product Name 3 Rotary Target Plasma Sputtering Coater Including 3 Targets - VTC-16-3HD-LD
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Product Code VTC-16-3HD-LD
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VTC-16-3HD-LD is a CE certified compact three rotary target plasma sputtering coater with a touch screen digital controller, and a substrate heater capable of heating up to 500 °C. It can coat 1- 3 types of metallic materials to sample with the diameter up to 50 mm. Three sputtering targets: gold, silver, copper are included for immediate use. (Updated on Aug, 21th, 2015: add shield / without pump)


Input Power

  •      • 
    Single-phase 220 VAC, 50 / 60Hz
  •      •  700 W (including vacuum pump)
  •      •  For using 110 VAC, we will include a transformer for you. Please select the voltage in the
            Product Options

Output Power

  •      • 
    1600 VDC
  •      •  40 mA max

Vacuum Chamber

Sample Stage with Heater

  •      •  Stage size: 50 mm Dia.
  •      •  Sputtering distance range: 25 – 40 mm adjustable
  •      •  Rotatable stage with three sputtering positions (controlled by the touch screen)
  •      •  The Optional Substrate heater has a maximum heating temperature of 500 °C
  •      •  PID temperature controller with +/- 1 °C accuracy is integrated into the touch screen

Control Panel

  •      •  6” color touch screen with PLC integration for easy operation
  •      •  Vacuum gauge, sputtering current meter, and substrate temperature control are integrated to
    touch screen panel
  •      •  Adjustment knobs on the front panel for gas intake and sputtering current control
  •      •  Sputtering position, sputtering timer, and process logging are accessible from the touch screen


  •      •  Stainless steel shield cage is included for extra protection

Sputtering Targets

  •      •  Target size requirements: 47 mm Dia. x 2.5 mm max
  •      •  Three targets are included in the standard package for immediate use:
    •          º  Au target, 47 mm Dia. x 0.12 mm
    •          º  Ag target, 47 mm Dia. x 0.5 mm
    •          º  Cu target, 47 mm Dia. x 2.5 mm
    •           º  Please click here to see recommended coating parameter for Au & Cu Target
  •      •  Various targets are available to order at MTI

Vacuum Pump


  •      •  Built-in KF25 vacuum port for connecting to a vacuum pump (Pic #1)
  •      •  Vacuum pump with KF25 connector is required, but not included. User may choose
    •          º  A double stage vacuum pump for vacuum up to 1.0E-2 Torr (Click Pic #2 to order)
    •          º  Or a turbopump for vacuum up to 1.0E-5 Torr  (Click Pic #3 to order)
  •      •  The vacuum pump can be plugged into the power outlet on the left of coater for automatic

  •     440 mm L × 330 mm W × 455 mm H
Net Weight
  •      •  50 kg

Operation Instructions


  •      •  CE approval
  •      •  NRTL certification is NOT available temporary.

  •      •  One year limited with lifetime support

Application Notes

  •      • 
    For the best film-substrate adhesion strength,
    please clean the substrate surface before
    •          º  Ultrasonic cleaning (Click the picture below to order) with the following sequential
                  baths - (1) acetone, (2) isopropyl alcohol - to remove oil and grease. Blow dry the
                  substrate with N2, then hot bake in vacuum to remove absorbed moisture
    •          º  Plasma cleaning (Click the picture below to order) may be needed for surface
                   roughening, surface chemical bonds activation, or additional contamination removal
    •          º  A thin buffer layer (~5 nm), such as Cr, Ti, Mo, Ta, could be applied to improve
                  adhesion of metals and alloys
  •      •  A two-stage pressure regulator (not included) should be installed on the gas cylinder to limit
            the output pressure of the gas to below 0.02 MPa for safe usage.
    Please use > 5N purity Ar gas
            for plasma sputtering
  •      •  HIGH VOLTAGE! Sputtering heads connect to high voltage. For safety, the operator must
            shut down the equipment before sample loading and target changing operations
  •      •  This model is not suitable for coating light metallic material such as Al, Mg, Zn, Ni, etc. due to
            low energy. Please consider our magnetron sputtering coater or thermal evaporation coater.
            Click pictures below for detail

                       Ultrasonic Cleaner                    Plasma Cleaner 

                       Magnetron Sputtering           Thermal  Evaporation