Input Voltage | 208 - 240 VAC, single phase, 50/60 Hz 110V version is available with a 1500W transformer. |
Power | < 2000W (including pump) |
Output Power | • Plasma Sputtering:- • Evaporation: 10VAC and Max. Current 20A (for tungsten wire baskets).
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Working chamber | - • Fused glass tube, 160 mm Dia. x 120mm Height
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Coating Head | • Two coating heads are included: - º DC sputtering head (2" target) ( Pic. 1 )
- º Thermal evaporation via tungsten wire baskets ( Pic. 2)
Pic.1 Pic. 2
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Sample stage | • One 50 mm Dia. sample stage, - • Max. coating area: 45 mm Dia
- • Evaporating fixture is included for coating lightweight metallic material, such as Al, Li, Mg
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Accessories included
| • Double Step Rotary Vane Vacuum Pump (external) with Pirani gauge and Vapor trap eliminates the oil mist is included, which can reach vacuum up to 10-2 torr- • One solenoid valve is included for automatic air bleed.
- • For better carbon evaporation, suggest use molecular pump as picture below right at extra cost, which can
reach vacuum up to 10-5 torr
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Gas atmosphere | One needle valve installed to allow Ar gas inlet to achieve better plasma coating |
Target & Evaporating source
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Overall dimension | L300mm x W400mm x H400mm |
Net Weight | 50 kg |
Operation Instructions |
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Compliance | • CE approval- • NRTL or CSA certification is available upon request at extra cost, please contact our sales representative for
quote.
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Warranty | One year limited with lifetime support |
Knowledge of Sputter Coating
| • MTI Corp. shares the most state-of-art sputter coating technology with our customer, please click the picture below to read the article - Plasma Sputter Coating.- • The system requires an Ar gas tank with pressure regulator which is not included
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