Plasma Sputtering Coaters & Plasma...

Two in One Film Coater: Plasma Sputter and Carbon Evaporating - GSL-1100X-SPC-16C-LD

Two in One Film Coater: Plasma Sputter and Carbon Evaporating - GSL-1100X-SPC-16C-LD

기본 정보
Product Name Two in One Film Coater: Plasma Sputter and Carbon Evaporating - GSL-1100X-SPC-16C-LD
Sale Price Call for Price
Product Code GSL-1100X-SPC-16C-LD
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상품 옵션
 

 GSL-1100X-SPC-16C-LD  is a two in one compact coating unit with Double Step Rotary Vane Vacuum Pump, which integrates plasma sputtering and evaporating into one small machine. It is specially designed for preparing SEM and EDAX sample for microstructure and micro-area composition analysis in material analysis at low cost. to coat various materials, including carbon.

SPECIFICATIONS

Input Voltage208 - 240 VAC, single phase, 50/60 Hz
110V version is available with a 1500W transformer.
Power< 2000W (including pump)

Output Power

  •      • 
    Plasma Sputtering:
    •          º  1600VDC  and 50mA max.
  •      •  Evaporation: 10VAC and Max. Current 20A (for tungsten wire baskets).

Working chamber
  •      •  Fused glass tube, 160 mm Dia. x 120mm Height

Coating Head

  •      • 
    Two coating heads are included: 
    •          º  DC sputtering head (2" target)  ( Pic. 1 )
    •          º  Thermal evaporation via tungsten wire baskets  ( Pic. 2)
                                Pic.1                         Pic. 2   



Sample stage

  •      • 
    One 50 mm Dia. sample stage, 
  •      •  Max. coating area: 45 mm Dia
  •      •  Evaporating fixture is included for coating lightweight metallic material, such as Al, Li, Mg




Accessories included

  •      •  
    Double Step Rotary Vane Vacuum Pump
     (external) with Pirani gauge and  Vapor trap eliminates the oil mist is
              included, which can reach vacuum up to 10-2 torr
  •      •  One solenoid valve is included for automatic air bleed.
  •      •  For better carbon evaporation,  suggest use molecular pump as picture below right at extra cost, which can
            reach vacuum up to 10-5 torr

                

Gas atmosphereOne needle valve installed to allow Ar gas inlet to achieve better plasma coating

Target & Evaporating source
Overall dimension

L300mm x W400mm x H400mm

Net Weight50 kg



Operation Instructions

   
       


Compliance

  •      • 
    CE approval
  •      •  NRTL or CSA certification  is available upon request at extra cost, please contact our sales representative for
            quote. 
                   

Warranty           One year limited with lifetime support

Knowledge of Sputter Coating

  •      • 
    MTI Corp. shares the most state-of-art sputter coating technology with our customer, please click the
            picture below to read the article - 
    Plasma Sputter Coating.
  •      •  The system requires an Ar gas tank with pressure regulator which is not included