Plasma Enhanced CVD Tube F...

1200ºC Max. PECVD Split Tube Furnace ( 2'' - 3.14'' OD) w/ 4 Channels Gas Delivery & Vacuum Pump - OTF-1200X-PEC4LV

1200ºC Max. PECVD Split Tube Furnace ( 2'' - 3.14'' OD) w/ 4 Channels Gas Delivery & Vacuum Pump - OTF-1200X-PEC4LV

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Product Name 1200ºC Max. PECVD Split Tube Furnace ( 2'' - 3.14'' OD) w/ 4 Channels Gas Delivery & Vacuum Pump - OTF-1200X-PEC4LV
Sale Price Call for Price
Product Code OTF1500XIIISL80
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by tube size

Personalization(Upgrade to Eurotherm Temp. Controller)

Personalization

 
OTF-1200X-PEC4LV is a CE certified compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 300W RF plasma source, 2"  or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high-quality mechanical pump.   The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nanowire from a gas state (vapor) to a solid state, and benefits:
  •      •  Lower temperature processing compared to conventional CVD.
  •      •  Film stress can be controlled by high/low frequency mixing techniques.
  •      •  Control over stoichiometry via process conditions.
  •      •  Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.

Specifications:


  Split Tube furnace



 

  •      • 
    1200
    oC Max. working temperature for < 60 minutes
  •      •  1100oC Max for continuous heating
  •      •  30 segments programmable precision digital temperature controller
  •      •  440 mm length single heating zone and 150 mm length constant temperate zone
  •      •  High purity quartz tube optional from ( click optional bar to choose )
            One pair of vacuum sealed flange with valves
    •          º  2"OD x 1.7"ID x  48" Length
    •          º  3.14"OD x 2.83"ID x 48'' Length
  •      •  Input power: 208 – 240V AC input, single phase at max. 4KW
  •      •  Two zones split furnace -OTF1200X-II is optional at extra cost


Plasma RF Power Supply

 
     



  •      • 
    Output Power:          5 -300W adjustable with ± 1% stability
  •      •  RF frequency:          13.56 MHz ±0.005% stability
  •      •  Reflection Power:     200W max.
  •      •  Matching:                Automatic
  •      •  RF Output Port:       50 Ω, N-type, female
  •      •  Noise:                      <50 dB.
  •      •  Cooling:                   Air cooling.
  •      •  Power:                     208-240VAC, 50/60Hz
  •      •  Note:                       This RF power supply can accept 50 - 80 mm Max. quartz tube 
                                            by changing flange

Anti-corrosive Pressure Gauge


  •      • 
    3.8x10
    -5 to 1125 Torr measurement range
  •      •  Anti-corrosive, gas-type independent
  •      •  High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  •      •  Fast atmospheric detection eliminates waiting time and shortens process cycle
  •      •  Easy to exchange plug & play sensor element
  •      •  Click the picture to view detail spec


 Vacuum Pump and valve
 

  •      •  Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System
             installed in the bottom case with max. vacuum pressure 10-2 torr.
  •      •   KFD25 adapter and stainless steel pipe are connected between pump and tube flange with
             precision ball valve
  •      •   Digital vacuum pressure gauge and display are installed with the furnace

Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution
EQ-VPC-MV. This is a vacuum pressure regulating system with motorized valve and gauge.
It controls pressure range from 10^-6 torr ~ 760 torrs.




Optional Oilless Pump


Please order the oilless pump for zero contamination:





Mass Flowmeter

   
 EQ-GSL-LCD 
   

  •      • 
    4-Channelled Gas Mixing
  •      •  Made of 316 stainless steel valve
  •      •  Gas mixing tank: Φ80X120mm  
  •      •  600mm(L) x 745mm(W) x 700mm(H)
  •      •  6" color touch screen control panel to make parameter setting at easy.
  •      •  Touchscreen Control and PC remote switchable.
  •      •  23W per channel
  •      •   AC 220V/50Hz Single phase


Temperature Controller

  •      • 
    MET certified 30 programmable segments for precise control of heating rate, cooling rate and
            dwell time.
  •      •  Built in PID Auto-Tune function with overheating & broken thermocouple protection.
  •      •  Over temperature protection and alarm allows for operation without attendant(s).
  •      •  +/- 1 ºC temperature accuracy.
  •      •  RS485 Communications Port.
    •          º  Advanced Temperature Control (Optional)
    •          º  MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop
                 package is available at the options bar.
                Click for the detail information about the MTS02-Y software kit.
    •          º  You may upgrade the temperature controller to the Eurotherm 3204 Temperature
                 Controller
       which is fully compatible with LabVIEW. This package includes a Eurotherm
                  3204 programmer, a communication cable (RS485 - USB) and a software CD.
                  Click the pic below to view the full spec of Eurotherm 3204 temperature controller.

  •      •             


Optional
                               click here to choose a crucible


Overall dimensions

  •      • 
    Furnace: 550mm(L) x 380mm(W) x 520mm(H)
  •      •  2 Bottom Mobile case together: 1200mm(L) x 1200mm(W) x 1200mm(H)
  •      •  Net weight: 220 lbs
  •      •  Shipping weight: 350 lbs

Warranty
One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)

Laptop, software & WiFi Control (Optional)

  •      •  Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial)
            for immediate use.
  •      •  Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature
            profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  •      •  A wireless remote control provides up to 300 meters operating range.
  •      •  Above features are available upon request at an extra cost (up to $1,000). Please contact us
            for more information.
  •      •  Note:
           The software is only compatible with MTI’s Yudian Temperature Controller

               


Compliance

  •      •  CE Certified
  •      •  All electric components ( >24V) are UL / MET / CSA certified, not including the gas mixing system,
           vacuum system, and plasma generator
  •      •  The furnace is ready to  pass TUV(UL61010) or CSA certification at extra cost.
         ( please click marks below to learn details )

                     

Patten Number: ZL-2011-2-0355777.1

Operation Instruction


        

Warning


Click here to learn the installation of a gas regulator

  •      •  The tube furnaces with quartz tube are designed for using under vacuum and low pressure
            < 0.2 bars / 3 psi / 0.02 Mpa
  •      •  Attention: A two-stage pressure regulator must be installed on the gas cylinder to
            limit the pressure to below 3 PSI for safe operation.
     
            Click here to learn the installation of a gas regulator.
  •      •  Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely
            used up to 1000°C
  •      •  The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal
            shocks to the tube
  •      •  MTI reserves right to modify PECVD design at  any time without notice but promise that
            quality will meet the specifications above


Shipping Dimensions

  •      • 
    Pallet #1: 48" x 40" x 65"
  •      •  Pallet #2: 48" x 40" x 40"
  •      •  Pallet #3: 48" x 40" x 40"
  •      •  Pallet #4: 48" x 40" x 40"

Total Shipping Weight1100 lbs