HPCVD System

1200ºC PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC and Vacuum Pump - OTF-1200X-II-PEC4

1200ºC PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC and Vacuum Pump - OTF-1200X-II-PEC4

기본 정보
Product Name 1200ºC PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC and Vacuum Pump - OTF-1200X-II-PEC4
Sale Price Call for Price
Product Code OTF1200XIIPEC4
Quantity 수량증가수량감소
상품 옵션
OTF-1200X-II-PEC4 is a 1200ºC Rotatable Two-Zone Plasma-Enhanced Hybrid-Physical-Chemical Vapor Deposition (PE-HPCVD) system. It consists of a Tiltable Frame, 300W RF Plasma Generator & Matching Network, Up-Stream Source Evaporation Boat with Power Supply, Four-Channel MFC Gas Delivery, and High-Performance Vacuum Pump. Such a complete system is an excellent tool for heat-treating inorganic compound powders with superior temperature and surface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on the surface).


System Structure

  •      •  0~25° adjustable tilt frame assists smooth powder 
  •      •  Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma-enhanced
             processing which significantly reduces the needs for high-temperature process
  •      •  Gear-driven tube rotation allows "blending" type processing for powders to achieve the best
            processing uniformity
  •      •  Four-channel gas mixing station with MFCs provide precise control of gas delivery
  •      •  The integration of Up-Stream Source Evaporation Boat with tungsten coil allows you sublimate
            solid precursors for the needs of Hybrid Physical-Chemical processing


Two-Zone Rotary Furnace

  •      •  Working temp: 1200ºC Max(<1hrs)., and 1100ºC for continuous heating
  •      •  Two PID temperature controllers with 30 segments programmable.
  •      •  Input Power: 208 – 240VAC, a single phase at max. 2.5KW.
  •      •  High purity Alumina fibrous insulation for max. energy saving
  •      •  Gear DC motor drives quartz tube with variable speed 2 - 10 RPM
  •      •  The split cover enables faster cooling and easy operation
  •      •  Two zones: each zone length 8" (200 mm), total 16" (400 mm) heating zone
  •      •  Constant temperature zone: 200 mm within +/-1oC if two zones at the same temperature.

Plasma RF Power Supply

  •      •  Output Power:           5 -300W adjustable with ± 1% stability.
  •      •  RF frequency:           13.56 MHz ±0.005% stability.
  •      •  Reflection Power:      100W max.
  •      •  Matching:                  Automatic
  •      •  RF Output Port:         50 Ω, N-type, female
  •      •  Noise:                       <50 dB.
  •      •  Cooling:                     Air cooling.
  •      •  Power:                      208-240VAC, Single Phase, 50/60Hz

Evaporation Boat  

  •      •  Working temp: 1300ºC Max(<1hrs)., and 1200ºC for continuous heating
    ºC with the furnace chamber heated to 800ºC)
  •      •  0.7ml alumina crucible with tungsten heating coil surrounded.
  •      •  S type thermocouple inserts for accurate temperature measurement of the source material.
  •      •  500W DC evaporation power supply with max. operating current @ 30Amps


Sealing Flanges

    •      •  Standard:  4'' O.D Fused quartz processing tube, please click the pic on the left for details
    •      •  One pair of 60mm SS sealing flange with rotatable gas connector needle valves and are included
              for immediate use

    Sealing Flanges


    •      •  A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube
    •      •  Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting.

                        Left Flange Set             Right Flange Set

    Tube Rotation Speed
    •      •  0 - 5 RPM variable
    Furnace Tilt Angle
    •      •  0~30°

    Vacuum Pump & Gauge

    •      •  EQ-FYP High-Performance Dual Stage Vacuum Pump is included in the sale, please click the
              image on the left to see detail specs.
    •      •  KF25 adapter and stainless steel bellows are connected between pump and tube flange
    •      •  10E-2 Torr vacuum can be achieved inside the processing tube   
    •      •  Note: Vacuum Gauge is available at additional cost, please click underline and to order

    MFC Gas Mixing Station

    •      •  Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom
              case to control gas flow rate automatically.
      •          º  MFC 1: Gas flow range from 0~100 SCCM
      •          º  MFC 2&3: Control range from 0~200 SCCM  
      •          º  MFC 4: Control range from 0~500 SCCM
    •      •  Gas inlet/outlet fittings: 6mm O.D tube fitting
    •      •  Power: 208-240VAC 50/60Hz
    •      •  Stainless steel needle valves for manual ON/OFF control of gas supply.
    •      •  Large PLC touch screen control enables easy flow rate settings

    Temperature Control

    •      •  Two heating zone design with individual temperature controller
    •      •  Precise PID control of heating, cooling rate and dwell time, 30 programmable segments for
    •      •  Built-in overheating & broken thermocouple protection.
    •      •  Over-temperature protection and alarm allow for operation without attendant(s).
    •      •  +/- 1 ºC temperature accuracy.
    •      •  Three K-type thermocouples (one for each zone).
    •      •  RS485 Communications Port.
    •      •  Optional:  
      •          º  The furnace may be operated by PC by installing a control module.
                     Please order an
        MTS-02 control module at extra cost.
      •          º  If you order the PC control module together with the furnace, we will install and test it
                    before shipping. We recommend you to order a computer laptop from us to avoid
                    software installation problems. For more information please
        click here.

    Volumetric Feeder and Collector Tank (Optional)


    •      •  EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a
               built-in vibrator. It is designed fo
      r feeding solid powder into a furnace for continuous firing/heat
               treating. Please click the pic.1 on the left to order.
    •      •  Stainless steel collection tank  ( 2 Liter Capacity ) can be installed on the other end of processing
              tube to gather the fired powder without exposure to air.
       Please click the pic.2 on the left to see details
    •      •  You may add a vacuum gate valve on the top of the sample collecting tank for air-sensitive material.
               (Pic 3)
    •        Pic.1          Pic.2   Pic.3

    Dimensions & Weight

    •      •  Furnace: 2800mm L x 800mm W x 1700mm H (with lid opened); Gas Mixing Station:
              600mm L x 850mm W x 700mm H
    •      •  Net weight: 400 Lbs.
    •      •  Shipping Weight: 500lbs.

    One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).

    Laptop, software & WiFi Control (Optional)

    •      •  Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for
               immediate use.
    •      •  Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature
              profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
    •      •  A wireless remote control provides up to 300 meters operating range.
    •      •  Above features are available upon request at an extra cost (up to $1,000). Please contact us for
              more information.
    •      •  Note: The software is only compatible with MTI’s Yudian Temperature Controller


    •      •  CE Certified
    •      •  NRTL or CSA certification is available upon request at the extra cost.

    •      •  The tube furnaces with mullite tube are designed for using under vacuum and low pressure
             < 0.02 Mpa / 3 PSI
    •      •  Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit
              the pressure to below 3 PSI for safe operation.
            Click here to learn the installation of a gas regulator.
    •      •  Never heat the furnace while the gas release valve is closed and a positive pressure condition
              exists within the furnace chamber. The pressure gauge must be used to closely monitor the
              chamber condition at all times during the heating process; please open the gas release valve
              immediately once the chamber pressure has reached over 3 PSI to prevent unforeseeable damages.
    •      •  The flow rate for gasses should be limited to < 200 SCCM ( or 200ml/min )
    •      •  Vacuum limit definition for all mullite tube furnaces: * Vacuum pressures may only be safely used
              up to 1300°C

    Operation Instructions
               Installation Video                   Demo Video