Plasma Enhanced CVD Tube F...

Compact Auto-Sliding PECVD Tube Furnace with 2" OD Quartz Tube and Vacuum Pump, Max. 1200C - OTF-1200X-S50-PESL

Compact Auto-Sliding PECVD Tube Furnace with 2" OD Quartz Tube and Vacuum Pump, Max. 1200C - OTF-1200X-S50-PESL

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Product Name Compact Auto-Sliding PECVD Tube Furnace with 2" OD Quartz Tube and Vacuum Pump, Max. 1200C - OTF-1200X-S50-PESL
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Product Code OTF-1200X-S50-PESL
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OTF-1200X-50S-PESL is an affordable and compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system with a slideable mechanism. It consists of a 300W RF plasma generator, a 2"O.D split tube furnace and the integrated slidable rail which allows you preheat and slide the furnace to the sample zone in order to get your sample an instant exposure under high temperature. This system can be updated to an advanced model with options. It is an ideal tool for the researcher to make innovation under a limited budget.

  •      •  Lower temperature processing compared to conventional CVD.
  •      •  High heating & cooling rate using sliding furnace
  •      •  Film stress can be controlled by high/low frequency mixing techniques.
  •      •  Control over stoichiometry via process conditions.
  •      •  Can do a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.


Auto-Sliding Split Tube furnace

two zone heating is available upon request

  •      • 
    Input power: 208 – 240V AC, 1.2kW
  •      •  1200°C Max. working temperature for < 60 minutes
  •      •  1100°C Max for continuous heating
  •      •  High purity quartz tube 2"OD x 1.7"ID x  39.4" Length
  •      •  30 segments programmable precision digital temperature controller
  •      •  8" (200mm), single zone. 2.3" (60mm)  (+/-1°C) @ 1000°C The following picture shows the
             temp. distribution across the heating zone, please click to enlarge.

                  Temp. distribution profile    

Plasma RF Generator

  •      •  O
    utput Power:          5 -300W adjustable with ± 1% stability
  •      •  RF frequency:          13.56 MHz ±0.005% stability
  •      •  Reflection Power:      200W max.
  •      •  Matching:                 Automatic
  •      •  RF Output Port:        50 Ω, N-type, female
  •      •  Noise:                      <50 dB.
  •      •  Power:                     208-240VAC, 50/60Hz
  •      •  Cooling:                   Air cooling. (water cooling is available upon request, and a water chiller
                                            can be ordered separately
                                            Note: Water cooling is necessary for long time operation

Vacuum Flanges and Fittings

  •      • 
    Vacuum flange set is made of stainless steel 304.
  •      •  Left flange assembly includes a KF-25 vacuum port, two KF-25 quick clamps, a KF-25 right
            angle valve, a KF-25 vacuum bellows, flange support, 3/8 O.D barbed fitting, and a needle
  •      •  Right flange assembly includes a digital Pirani gauge, 1/4 O.D tube fitting, 1/4" feedthrough,
            a needle valve, and a KF-16 quick clamp set

Vacuum Pump

  •      •  208 - 240V / 50-60 Hz (750W Max.)
  •      •  220 liters / M or 7.8 CFM
  •      •  Oil Mist Eliminator is included
  •      •  Max. vacuum:  3 X 10E-3 torr

Product Dimensions

  •      •  Overall Dimensions: 1500mm x 600mm x 1200mm (all system, L x W x H)
  •      •  Net weight: 350 lbs
  •      •  Shipping weight: 480 lbs

Oxygen Monitoring

An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or
reducing oxidation. Please click the picture below to learn more:



  •      •  The OTF-1200X-S50-PESL package adds gas mixing & delivery capabilities onto the furnace
             system by integrating
    four Channel Gas Mixing Station with PLC Touch Panel Control and
             Precision Mass Flow Meters.
             Please select this model from Product Options above.



  •      •  One year limited warranty with lift time support (Consumable parts such as processing tubes,
            o-rings, and heating elements are not covered by the warranty, please order the replacement
            at related products below.)

Laptop, software & WiFi Control (Optional)

  •      •  Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial)
             for immediate use.
  •      •  Labview Based Temperature Control System (EQ-MTS01) enables a user to edit temperature
            profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  •      •  A wireless remote control provides up to 300 meters operating range.
  •      •  Above features are available upon request at an extra cost (up to $1,000). Please contact us
            for more information.
  •      •  Note:
           The software is only compatible with MTI’s Yudian Temperature Controller



  •      •  CE Certified
  •      •  All electric components ( >24V) are UL / MET / CSA certified
  •      •  The furnace is ready to pass UL(UL61010), CSA or TUV certification on customer side at extra
     ( please click marks below to learn details )


Operation Instructions


Warning & Note

Click here to learn the installation of a gas regulator

  •      •  Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2
             bars / 3 psi / 0.02 MPa. Vacuum pressures may only be safely used up to 1000°CThe flow
             rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks
             to the tube
  •      •  Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit
            the pressure to below 3 PSI for safe operation.
            Click here to learn the installation of a gas regulator.
  •      •  MTI reserves right to modify PECVD design at  any time without notice but promise that quality
            will meet the specifications above