RTP Furnaces

 
 
 
UL Standard Compact RTP Furnace with 4" ID Quartz Tube & Digital Vacuum Gauge up to 1100ºC - OTF-1200X-RTP-4

UL Standard Compact RTP Furnace with 4" ID Quartz Tube & Digital Vacuum Gauge up to 1100ºC - OTF-1200X-RTP-4

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Product Name UL Standard Compact RTP Furnace with 4" ID Quartz Tube & Digital Vacuum Gauge up to 1100ºC - OTF-1200X-RTP-4
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Product Code OTF-1200X-RTP-4
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UL/CSA Certification

Upgrade to Eurotherm Temperature controller

 
OTF-1200X-RTP-4 is a  compact rapid thermal processing tube furnace with a 4" I.D. processing quartz tube
and vacuum flanges. It is designed for annealing semiconductor wafers or solar cells with diameters up to 3".
OTF-1200X-4-RTP is heated by 8 units of 1KW halogen light with a max. the heating rate of 50ºC/second. 30
segment precision temperature controller with +/-1ºC accuracy is built into the furnace to allow for heating,
dwelling, and cooling at various steps. RS485 port and control software are included to make monitoring the
temperature profile via PC while simultaneously running furnace possible. This furnace also can be modified
into an
 RTE, CSS or HPCVD  furnace ( see below application note )


SPECIFICATIONS



Furnace Structure

  •      • 
    Double layer steel casing with air cooling keeps furnace
            surface temperature lower than 60°C.  
  •      •  High purity fibrous alumina insulation for maximum energy
            saving.

  •      •  Split cover with Interlock protection, cut the power if lid open
            during furnace heating process.

Power Input

208-240 AC, 50/60 Hz single phase, 9 KW Max. (60A breaker required)


Heating Elements


  •      • 
    8 pcs 1Kw Halogen light tube,  ( Dia. =10mm,  L=300mm,
             Heated Length =200mm)

  •      •  Standard working life: 2000 hrs.  ( depends on heating rate )
  •      •  The Halogen light tube is consumable.  Please click picture
            left to order spare one

       

Heating Zone

12" length with 4" constant temperature zone within +/-5ºC uniformity


Working Temperature


  •      • 
    1100ºC Max. for < 10 minutes

  •      •  1000ºC Max. for < 20 minutes   (Note: if running longer time,
             furnace case will > 100oC, must use fan cooling case from
            outside )

  •      •  800ºC Max.   for < 120 minutes

  •      •  600ºC Max.   for Continuous

Max. Heating Rate

50ºC/sec


Cooling Rate


  •      • 
    Max. Cooling:
    60ºC/min (Under vacuum: 200 mtorr),
            117ºC/min (under atmospheric pressure)

  •      •  Lowest Cooling:   10 ºC / minute

Thermocouple

K type, the head of the thermocouple touches the Aluminum Nitride sample holder from underneath


Temperature Controller


  •      •  FA-YD518P-AG
     temperature controller is included.

  •      •  Proportional–integral–derivative control (PID control) and
            auto-tune function


  •      •  30 segments programmed with ramping, cooling and dwelling
            steps


  •      •  Built-in over-temperature alarm and thermocouple failure
             alarm


  •      •  +/- 1 ºC temperature control accuracy

  •      •  Default DB9 PC communication port

  •      •  MET Certified


Temperature controller (optional)



Quartz Tube & Sample Holder

                     


Vacuum Flange


  •      • 
    KF-D25 High Vacuum Flange is made of stainless steel with
            double hi-temp. silicone O-rings, needle valves, and water
            cooling jacket.

  •      •  Only requires water cooling in long running times at
             temperatures > 600
    oC.

  •      •  Circulating water rate: 0.5 m3 /hr.

  •      •  The slide-out flange provides an easier way of loading,
             unloading the samples and other specific process needed.

  •      •  Insert-able thermal-couple for accurate measurement.


Vacuum Pump  (optional)



  •      • 
    EQ-FYP vacuum pump is recommended for this furnace.
            The ultimate vacuum pressure in this system can be 10^-3
             torr. Vacuum bellows and clamps are included in this
             package. Click here for the spec of EQ-FYP vacuum pump.

  •      •  Click here to view other models of pump and package.


Water Cooling  (optional)


  •      • 
    Cooling water is required.

  •      • Please make sure the flow rate of cooling water is ≥ 10L/min,
            water temp. < 25ºC; pressure > 25 PSI.

  •      •  We suggest using the EQ-KJ5000 Series recirculating water
           chiller
    as a cooling system (please order separately at related
            products below) to save water.
       

  •      •  Warning: This RTP furnace's max dwelling time shall be less
            than 600 seconds at 1000ºC ~ 1100ºC with tap water,
            otherwise O-ring may melt.

Flow-meter

One flow meter is installed on the front panel for adjusting gas flow from 16 - 160 ml/min

Vacuum Gauge

Digital vacuum gauge with a measurement range from 10-4 to 1000 Torr is installed on the furnace.


Vacuum Pressure & Gas Fitting


  •      • 
    Pressure can reach 50 mtorr by using mechanical vacuum
            pump with KF25 adapter

  •      •  Pressure can reach 10-4 torr by molecular pump with KF25
            adapter



Dimensions




  •      •  
     Flange closed: 760mm(L) X 330mm(W) X 530mm(H) /
             Flange opened: 1200mm(L) X 330mm(W) X 530mm(H)

Net Weight

70 kg (150 lbs)


Warranty


One year limited manufacturer warranty with lifetime support (Consumable parts such as processing tubes, o-rings and halogen lamps are not covered by the warranty, please order replacements at related products below).


Laptop, software & WiFi Control(Optional)


  •      • 
    Brand new laptop with Microsoft Window 10 and Microsoft
            Office 2013 (30 days free trial) for immediate use.

  •      •  Labview Based Temperature Control System (EQ-
           MTS01
    )
     enables user to edit temperature profile, manage

            heat-treatment recipe, record and plot data for MTI furnaces.
  •      •  A wireless remote control provides up to 300 meters
            operating range.

  •      •  Above features are available upon request at an extra cost
            (up to $1,000). Please contact us for more information.

  •      •  Note:
            The software is only compatible with MTI’s Yudian
            Temperature Controller


               

Compliance


Please select the certificate in options bar:

CE Certificate & UL/CSA ready: CE approval, ready to pass UL/CSA certificate
UL certircate -  UL apprval (UL 61010), at extra cost

      

  •      •  Patten Number :  ZL-2011-2-0077168.4 SINCE 2011-3-22


Optional

 

 


  •      • 
    You may combine the RTP furnace with high vacuum station
            or gas livery system as vacuum furnace or CVD system.
            Click pictures below to see details

  •      •  For achieving fast cooling rate (< 10ºC/second), you may
            choose RTP furnace with sliding rail. Please click the picture
            below to see details.

  •      •  You may order pressure control module ( click picture below-
            right ) to keep chamber at constant pressure

               


Application Notes


   


  •      • 
    Tube furnaces with quartz tubes are designed for using under
             vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa.
             Vacuum pressures may only be safely used up to 1000°C
    The
             flow rate for gasses should be limited to<200 SCCM (or
            200ml/min) for reducing thermal shocks to the tube

  •      •  Attention: A two-stage pressure regulator must be
            installed on the gas cylinder to limit the pressure to
            below 3 PSI for safe operation.
     
    Click here to learn the
           installation of a gas regulator
    .


  •      •  This furnace also can be modified into an RTE, CSS or
            HPCVD  furnace
     with a graphite crucible coated with SiC
            ( click Pic-left for detail how to set up an RTE processing
            by DIY )

  •      •  After CVD, the graphene must be transferred from the metal
            catalyst to another substrate for most applications. By using
           the graphene transfer tape, the residue can be low.


Operation Instructions


   

               

   


STANDARD PACKAGE

Item No.

Description

Quantity

Quick Links

EQ-CVM-211

Digital Vacuum Gauge Up to 10-4 Torr

1

EQ-KF-Valve-D25

Vacuum Ball Valve with Dual KF-D25 port

1

RTP-ACC-01

Sample Holder for RTP furnace

1

AIN-Holder

Aluminum Nitride Substrate for RTP Furnace's Sample Holder

1

EQ-QZTube-RTP

Quartz Tube: 4.33" O.D x 4.05" I.D x 16.2" Length for RTP Tube Furnace

1

RTP-ACC-02

Quartz heat shield disk

4

EQ-WCT-12

20ft.polyurethane tube O.D. 12mm I.D. 8mm W.P. 100PSI

1

EQ-SOR-110

Inner Rubber O-Ring 110 mm Diameter (4 pcs preinstalled)

8 in total

EQ-SOR-128

Outer Rubber O-Ring 128 mm Diameter (2 pcs preinstalled)

4 in total

EQ-RTP-Halogen-light

Halogen light

8

MTI-WATER-CONN

Water Hose Connector

2

EQ-KF-Clamp-D25

Quick Clamp with Rubber O-Ring for KF-D25 Vacuum adapter

2

EQ-TC-K-Cali-12S-DT-LD

K-Type Thermocouple

1