Furnace Structure | • Double layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
- • High purity fibrous alumina insulation for maximum energy
saving.
- • Split cover with Interlock protection, cut the power if lid open
during furnace heating process.
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Power Input | 208-240 AC, 50/60 Hz single phase, 9 KW Max. (60A breaker required)
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Heating Elements
| • 8 pcs 1Kw Halogen light tube, ( Dia. =10mm, L=300mm, Heated Length =200mm)
- • Standard working life: 2000 hrs. ( depends on heating rate )
- • The Halogen light tube is consumable. Please click picture
left to order spare one
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Heating Zone | 12" length with 4" constant temperature zone within +/-5ºC uniformity |
Working Temperature
| • 1100ºC Max. for < 10 minutes
- • 1000ºC Max. for < 20 minutes (Note: if running longer time,
furnace case will > 100oC, must use fan cooling case from outside )
- • 800ºC Max. for < 120 minutes
- • 600ºC Max. for Continuous
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Max. Heating Rate | 50ºC/sec |
Cooling Rate
| • Max. Cooling: 60ºC/min (Under vacuum: 200 mtorr), 117ºC/min (under atmospheric pressure)
- • Lowest Cooling: 10 ºC / minute
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Thermocouple | K type, the head of the thermocouple touches the Aluminum Nitride sample holder from underneath
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Temperature Controller
| • FA-YD518P-AG temperature controller is included.
- • Proportional–integral–derivative control (PID control) and
auto-tune function
- • 30 segments programmed with ramping, cooling and dwelling
steps
- • Built-in over-temperature alarm and thermocouple failure
alarm
- • +/- 1 ºC temperature control accuracy
- • Default DB9 PC communication port
- • MET Certified
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Temperature controller (optional)
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Quartz Tube & Sample Holder
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Vacuum Flange
| • KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves, and water cooling jacket.
- • Only requires water cooling in long running times at
temperatures > 600oC.
- • Circulating water rate: 0.5 m3 /hr.
- • The slide-out flange provides an easier way of loading,
unloading the samples and other specific process needed.
- • Insert-able thermal-couple for accurate measurement.
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Vacuum Pump (optional)
| • EQ-FYP vacuum pump is recommended for this furnace. The ultimate vacuum pressure in this system can be 10^-3 torr. Vacuum bellows and clamps are included in this package. Click here for the spec of EQ-FYP vacuum pump.
- • Click here to view other models of pump and package.
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Water Cooling (optional)
| • Cooling water is required.
- • Please make sure the flow rate of cooling water is ≥ 10L/min,
water temp. < 25ºC; pressure > 25 PSI.
- • We suggest using the EQ-KJ5000 Series recirculating water
chiller as a cooling system (please order separately at related products below) to save water.
- • Warning: This RTP furnace's max dwelling time shall be less
than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise O-ring may melt.
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Flow-meter | One flow meter is installed on the front panel for adjusting gas flow from 16 - 160 ml/min |
Vacuum Gauge | Digital vacuum gauge with a measurement range from 10-4 to 1000 Torr is installed on the furnace. |
Vacuum Pressure & Gas Fitting
| • Pressure can reach 50 mtorr by using mechanical vacuum pump with KF25 adapter
- • Pressure can reach 10-4 torr by molecular pump with KF25
adapter
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Dimensions
| • Flange closed: 760mm(L) X 330mm(W) X 530mm(H) / Flange opened: 1200mm(L) X 330mm(W) X 530mm(H)
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Net Weight | 70 kg (150 lbs) |
Warranty
| One year limited manufacturer warranty with lifetime support (Consumable parts such as processing tubes, o-rings and halogen lamps are not covered by the warranty, please order replacements at related products below).
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Laptop, software & WiFi Control(Optional)
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Compliance | Please select the certificate in options bar: CE Certificate & UL/CSA ready: CE approval, ready to pass UL/CSA certificate UL certircate - UL apprval (UL 61010), at extra cost
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Optional
| • You may combine the RTP furnace with high vacuum station or gas livery system as vacuum furnace or CVD system. Click pictures below to see details
- • For achieving fast cooling rate (< 10ºC/second), you may
choose RTP furnace with sliding rail. Please click the picture below to see details.
- • You may order pressure control module ( click picture below-
right ) to keep chamber at constant pressure
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Application Notes
| • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa. Vacuum pressures may only be safely used up to 1000°CThe flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
- • Attention: A two-stage pressure regulator must be
installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
- • This furnace also can be modified into an RTE, CSS or
HPCVD furnace with a graphite crucible coated with SiC ( click Pic-left for detail how to set up an RTE processing by DIY )
- • After CVD, the graphene must be transferred from the metal
catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low.
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Operation Instructions
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