Furnace structure & Vacuum Chamber
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• Two temperature controllers.- • The chamber is made of high purity fused quartz tube.
- • Quartz tube size: 11" OD/10.8" ID x 9" H
- • The vacuum flanges are made of Stainless Steel 316.
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• Top Flange with one KFD-25 vacuum port and one gas outlet (1/4" pipe required) can slide up or down manually
to load and unload substrate and evaporated material easily.- • Bottom flange has one KFD-25 vacuum port with one gas inlet (1/4" pipe required) with needle valves.
- • The flange is sealed by double silicone o-rings and can achieve max. the vacuum pressure of 10E-2 Torr by a
quality mechanical pump and 10E-5 Torr by a molecular pump (vacuum pump is not included, please order
separately). - • One digital vacuum gauge is installed on the top flange.
- • Precision anti-corrosion digital vacuum gauge is in standard package (Since 2016.03.24).
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Gas Flow Control
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Gas mixer integrated with two float-meters with adjustable measurement ranges of 16 -160 mL/m |
Heater and Sample Holder
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• Two independently controlled heaters with a manually adjustable gap from 2 - 30 mm.
- • 20 pcs Halogen lamps are used as the heating element for rapid thermal processing.
- • Heaters are is made of stainless steel with water cold jacket to reduce heat radiation and allow for fast cooling.
- • 5" Dia. the circular wafer holder is built into the top heater for holding the substrate.
- • One set of high thermal-conductive AlN plates or graphite plate (5" Dia. x 0.5mm Thick) is included
(place on the bottom for evaporating material ) - • A 58L/min circulating water chiller is included for saving water source ( click the picture below to see detailed
specs).
   
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Temperature Controller
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• Two precision digital temperature controllers with 30 segments programmable offer independent control of the top
and bottom heaters.- • Each controller has PID autotune function to protect heaters from overshooting and an alarm function to avoid
overheating and a thermal couple are broken. - • PC communication interface & software is installed for (click the picture below for details) recording temperature
profile shown as below.
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Working Temperature
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• Maximum temperature for each heater: <= 800ºC.- • Maximum temperature difference between two heaters: <= 300ºC depends on the spacing between two heaters:
- º Spacing 30mm Max. temp difference: 315ºC @ heating bottom only
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Heating & Cooling Rate |
• Heating: < 8ºC/s ( heating single heater only )- • Cooling: < 10ºC/s (600 - 100ºC) Max.
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| Thermal Couple | Two K-type thermal couples are installed on top and bottom heaters separately. |
| Working Voltage | 220VAC, Single Phase, 60A Air Breaker required
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| Power Requirement | 9.5KW total |
Dimensions
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 1085mm L x 680mm W x 1710mm H |
Shipping Weight & Dimension
| - • Two pallets: 525 lbs and 48" x 40" x 87" and 165 lbs with 39x31x29" dimension
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Optional
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• One vacuum pump is required. Please order separately by clicking the first picture from the left below. Vacuum
level can reach < = 10E-2 torr by mechanical pump. - • If you run corrosive gas, please consider to use the anti-corrosive dry pump is shown in the second picture from
the left below ( Pfeiffer pump from Germany ) at extra cost. - • You may choose digital MFC gas delivery system by clicking the first picture from the right below.
  
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| Warranty | One year limited with lifetime support ( Consumable parts such as quartz tube and heating lamps are not covered by the
warranty). |
Laptop, software & WiFi Control (Optional)
 
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• Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.- • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage
heat-treatment recipe, record and plot data for MTI furnaces. - • A wireless remote control provides up to 300 meters operating range.
- • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
- • Note: The software is only compatible with MTI’s Yudian Temperature Controller
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Compliance |
• CE Certified- • NRTI or CSA Certification is available upon request, additional charges will apply.
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Operation Instructions |
 
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Application Notes & Warnings
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• The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02
Mpa. Vacuum pressures may only be safely used up to 1000°C. The flow rate for gasses should be limited to < 200
SCCM (or 200 ml/min) for reducing thermal shocks to the tube.- • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to
below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. - • The foot-stand of this furnace is designed for short distance hauling on the even surface
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References
(please click right to see related articles) | |
