Plasma Enhanced CVD Tube F...

1500ºC Max.Three Zone PECVD Tube Furnace (80 mm OD) with 4 Channel Gas Delivery & Oil-less Vacuum Pump - OTF-1500X-III-PEC4SL

1500ºC Max.Three Zone PECVD Tube Furnace (80 mm OD) with 4 Channel Gas Delivery & Oil-less Vacuum Pump - OTF-1500X-III-PEC4SL

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Product Name 1500ºC Max.Three Zone PECVD Tube Furnace (80 mm OD) with 4 Channel Gas Delivery & Oil-less Vacuum Pump - OTF-1500X-III-PEC4SL
Sale Price Call for Price
Product Code OTF1500XIIISL80
Quantity 수량증가수량감소
Stock 자세히
상품 옵션
Personalization(Upgrade to Eurotherm Temp Programmer (three zone) Upgrade + 15 Laptop + USB-to-RS485 Cable)

 
OTF-1500X-III-PEC4SL is three zones 1500ºC PE-CVD tube furnace system consists of 300W RF plasma source, 81Dx 2133mm mullite tube furnace with an integrated channel precision mass flow meter with gas mixing tank, and a high-quality oilless vacuum pump. Such a PE-CVD furnace is a new tool to grow nanowire or graphene or SiC coating.
(item number has been updated from OTF-1500X-80-III-4CV-PE-SL since March 2019)


SPECIFICATIONS:


Three Zone 1500°C Split Tube furnace
   


  •      •  Max 1500ºC, and for 1400ºC continuous heating
  •      •  Three programmable precision digital temperature controllers with 30 segments.
  •      •  Three separately controlled Heating Zones:
    •          º  200 mm / each  ( included 20 mm spacing )
    •          º  Total zone length:  600 mm  
  •      •  Mullite ceramic tube made in USA, Size: 81 O.D x 73 I.D x 2133 L mm
             ( click picture left to order spare )
  •      •  Input power: 208 – 240V AC input, single phase at max. 6.6KW.
  •      •  Click Picture below left to see detail specs.
  •      •  Vacuum sealing flanges are included for immediate use.  One end flange has a quartz window
            so that plasma glowing can be seen through the window ( click picture below right  to see details )




Plasma RF Power Supply
 

  •      • 
    Output Power:           5 -300W adjustable with ± 1% stability.
  •      •  RF frequency:           13.56 MHz ±0.005% stability.
  •      •  Reflection Power:      200W max.
  •      •  Matching:                   Automatic
  •      •  RF Output Port:         50 Ω, N-type, female
  •      •  Noise:                        <50 dB.
  •      •  Cooling:                     Air cooling.
  •      •  Power:                      208-240VAC, Single Phase, 50/60Hz


Anti-corrosive Pressure Gauge



  •      • 
    3.8x10
    -5 to 1125 Torr measurement range
  •      •  Anti-corrosive, gas-type independent
  •      •  High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  •      •  Fast atmospheric detection eliminates waiting time and shortens process cycle
  •      •  Easy to exchange plug & play sensor element
  •      •  Click the picture to view detail spec.


Oil-less Vacuum Pump Station and Valves
  

  •      •  
    Pfeiffer's High Speed ( 226L/min) Oil-less Dry Vacuum Pump, 10E-3 Torr Limit
     is installed inside the
              heavy duty mobile cart
  •      •  KF25 adapter and stainless steel pipe are connected between pump and tube flange with
            precision ball valve for customer's plug and play

  •      •  10E-2 Torr vacuum can be achieved inside processing tube    


Mass Flowmeters & Gas Mixing Station

  

  •      • 
    Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the
  •          bottom case to control gas flow rate automatically. One gas mixing tank is installed on the
             bottom case with liquid release valve.
    •          º  MFC 1: Gas flow range from 0~100 SCCM
    •          º  MFC 2&3: Control range from 0~200 SCCM  
    •          º  MFC 4: Control range from 0~500 SCCM
  •      •  Gas inlet fitting: four 1/4NPS.
  •      •  Gas outlet fitting: four 1/4NPS.
  •      •  Power: 185-220VAC 50/60Hz
  •      •  4 stainless steel needle valves are installed on the left side of the bottom case to manually
            control the mixing of 4 gas types.
  •      •  Four channel gas flows are integrated into one PLC with touch screen panel to control
  •      •  ( optional: constant pressure control module )


Temperature Control
 
 

  •      • 
    Three precision digital temperature controllers to control three heating zone independently
  •      •  PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  •      •  Built-in overheating & broken thermocouple protection.
  •      •  Over temperature protection and alarm allows for operation without attendant(s).
  •      •  +/- 1 ºC temperature accuracy.
  •      •  Three K-type thermocouples (one for each zone).
  •      •  RS485 Communications Port.
  •      •  Optional:  
    • The furnace may be operated by PC by installing a control module. Please order an MTS-02 control module at extra cost.
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
 
Overall Dimensions

  •      • 
    Furnace: 865 L x 654 W x 707 H mm
  •      •  Sliding Rail: dual rail with 1750 mm length
  •      •  Two Adjoined Bottom Mobile Cases: 1200 x 1200 x 1200mm.
  •      •  Net weight: 220 Lbs.
  •      •  Shipping weight: 1200lbs.

Warranty
One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).

Laptop, software & WiFi Control (Optional)

  •      • 
    Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for
            immediate use.
  •      •  Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature
            profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  •      •  A wireless remote control provides up to 300 meters operating range.
  •      •  Above features are available upon request at an extra cost (up to $1,000). Please contact us for
             more information.
  •      •  Note:    The software is only compatible with MTI’s Yudian Temperature Controller

  •           


Compliance

  •      • 
    CE Certified
  •      •  NRTL or CSA certification is available upon request at extra cost.
           ( please click marks below to learn details )

                      


  •      • 
    The tube furnaces with mullite tube are designed for using under vacuum and low pressure
            < 0.02 Mpa / 0.2 Bars / 3 PSI
  •      •  Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit
           the pressure to below 3 PSI for safe operation.
     
         Click here to learn the installation of a gas regulator.
     
  •      •  Never heat the furnace while the gas release valve is closed and a positive pressure condition
             exists within the furnace chamber. The pressure gauge must be used to closely monitor the
             chamber condition at all times during the heating process; please open the gas release valve
             immediately once the chamber pressure has reached over 3 PSI to prevent unforeseeable damages.
  •      •  The flow rate for gasses should be limited to < 200 SCCM ( or 200ml/min )
  •      •  Vacuum limit definition for all mullite tube furnaces: * Vacuum pressures may only be safely
            used up to 1300°


Operation Insturctions

   
         


Shipping Weight & Dimensions

  •      • 
    Total 4 Pallets
  •      •  #1: 1200 lbs, 93"x40"x59"
  •      •  #2: 220 lbs, 48"x40"x45"
  •      •  #3: 285 lbs, 48"x40"x45"
  •      •  #4: 200  lbs, 48"x40"x45"