Plasma Enhanced CVD Tube F...

Powder PE-CVD System with Automatic Powder Feeding & Receiving (5" Tube, 1200ºC Max.) - OTF-1200X-III-R5-PECVD

Powder PE-CVD System with Automatic Powder Feeding & Receiving (5" Tube, 1200ºC Max.) - OTF-1200X-III-R5-PECVD

기본 정보
Product Name Powder PE-CVD System with Automatic Powder Feeding & Receiving (5" Tube, 1200ºC Max.) - OTF-1200X-III-R5-PECVD
Sale Price Call for Price
Product Code OTF-1200X-III-R5-PECVD
Quantity 수량증가수량감소
상품 옵션
 
OTF-1200X-III-R5-PECVD is a 1200ºC Rotatable Three -Zone Plasma-Enhanced Chemical Vapor Deposition (R-PE-CVD) system which is designed fro powder surface coating to form core-shell structure particles at the relatively lower temperature.  The automatic powder feeding and receiving system is built in for continuous powder coating.  Temperature, plasma power, and 4 channel gas MFC is controlled by touch screen panel and laptop computer for easy operation

SPECIFICATIONS:


System Structure


  •      •  0~25° adjustable tilt frame assists smooth powder 
    loading/unloading
  •      •  Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma
            enhanced processing which significantly reduces the needs for high-temperature process
  •      •  Gear-driven tube rotation allows "blending" processing  powders to achieve the best processing
            uniformity
  •      •  Four-channel gas mixing station with MFCs provide precise control of gas delivery
  •      •  Airtight powder feeder and receiver are included for continuous powder coating processing up to
           1000 g.
       


Three-Zone Rotary Furnace


  •      •  Working temp: 1200ºC Max(<1hrs)., and 1100ºC for continuous heating
  •      •  Three digital temperature controllers with 30 segments programmable and +/-0.1 oC accuracy.
  •      •  Input Power: 208 – 240VAC, a single phase at max. 4.0 KW.
  •      •  The split cover enables faster cooling and easy operation
  •      •  Three heating zones: 6"+ 12"+ 6",  total 24" ( 609 mm)
  •      •  Constant temperature zone:  480 mm length +/-2ºC
  •      •  Gear DC motor drives quartz tube with variable speed 2 - 10 RPM


Plasma RF Power Supply

 
 

  •      •  Output Power:           5 -300W adjustable with ± 1% stability.
  •      •  RF frequency:           13.56 MHz ±0.005% stability.
  •      •  Reflection Power:      100W max.
  •      •  Matching:                  Automatic
  •      •  RF Output Port:         50 Ω, N-type, female
  •      •  Noise:                       <50 dB.
  •      •  Cooling:                     Air cooling.
  •      •  Power:                      208-240VAC, Single Phase, 50/60Hz


Quartz Tube



    •      •  One special designed 5'' O.D Fused quartz processing tube is included.
    •      •  Please click the pic below to see dimension
                   


    Sealing Flanges

      

    •      •  A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube
    •      •  Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting the fireline
              or downstream attachments (such as gas, powder and electrical delivery lines)

                         
                       Left Flange Set             Right Flange Set

    Tube Rotation Speed
    •      •  0 - 5 RPM variable
    Furnace Tilt Angle
    •      •  0~30°

    Vacuum Pump & Gauge
     

    •      • 
      EQ-FYP High-Performance Dual Stage Vacuum Pump is included in the sale, please click the
              image on the left to see detail specs.
    •      •  KF25 adapter and stainless steel bellows are connected between pump and tube flange
    •      •  10E-2 Torr vacuum can be achieved inside the processing tube   
    •      •  Note: Vacuum Gauge is available at additional cost, please click underline and to order


    MFC Gas Mixing Station
      

    •      •  Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom
              case to control gas flow rate automatically.
      • MFC 1: Gas flow range from 0~100 SCCM
      • MFC 2&3: Control range from 0~200 SCCM  
      • MFC 4: Control range from 0~500 SCCM
    •      •  Gas inlet/outlet fittings: 6mm O.D tube fitting
    •      •  Power: 208-240VAC 50/60Hz
    •      •  Stainless steel needle valves for manual ON/OFF control of gas supply.
    •      •  Large PLC touch screen control enables easy flow rate settings


    Volumetric Feeder and Collector Tank

      
    Pic.1                   Pic.2


    •      •  EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a
               built-in vibrator. It is designed fo
      r feeding solid powder into a furnace for continuous firing/heat
               treating with adjustable feeding speed 0 - 97 ml/minute. Please click the pic.1 on the left  

    •      •  Stainless steel collection tank  ( 2 Liter Capacity ) can be installed on the other end of processing
               tube to gather the fired powder without exposure to air.
       Please click the pic.2 on the left to see details

    Dimensions & Weight



    •      •  Furnace: 2800mm L x 800mm W x 1700mm H (with lid opened); Gas Mixing Station:
              600mm L x 850mm W x 700mm H; the measurement is
      measured approximately.
    •      •  Net weight: 400 Lbs.
    •      •  Shipping Weight: 500lbs.

    Warranty
    One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).

    Laptop, software Control (Optional)

    •      •  Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for
              immediate use.
    •      •  The software will integrate temperature control, gas MFC control, Plasma control for remote
              operation
    •           


    Compliance

    •      •  CE Certified
    •      •  NRTL(UL61010) or CSA certification is available at extra cost. 
             ( please click marks below to learn details )
                           


    •      •  The tube furnaces with mullite tube are designed for use under vacuum and low pressure < 0.02 Mpa
    •      •  Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the
              pressure to below 3 PSI for safe operation.
       
      Click here to learn the installation of a gas regulator.
       
    •      •  Never heat the furnace while the gas release valve is closed and a positive pressure condition exists
              within the furnace chamber. The pressure gauge must be used to closely monitor the chamber
              condition at all times during the heating process; please open the gas release valve immediately
              once the chamber pressure has reached over 3 PSI to prevent unforeseeable damages.
    •      •  The flow rate for gasses should be limited to < 200 SCCM ( or 200ml/min )

    Operation Demo Vidoe