Plasma/ UO Cleaners

Compact UV-Ozone Cleaner with 4"x 4" Chamber - EQ-PCE-44-LD

Compact UV-Ozone Cleaner with 4"x 4" Chamber - EQ-PCE-44-LD

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Product Name Compact UV-Ozone Cleaner with 4"x 4" Chamber - EQ-PCE-44-LD
Sale Price Call for Price
Product Code EQ-PCE-44-LD
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PCE-44-LD is a compact Ultraviolet (UV) Ozone cleaner, which is used for cleaning all types crystal substrates to achieve better thin film quality at low cost. Also, it is an excellent tool to remove and strip photoresist, improve surface wettability, Clean SEM & TEM samples, UV polymer activation, assembly etc.
UV-Ozone Cleaner has proven to be highly effective for non-acidic, dry, non-destructive atomic cleaning and removal of organic contaminants using intense 185 nm and 254 nm UV light. Under air and room temperature, the 185 line produces Ozone and while the 254 line excites organic molecules on the surface. This combination drives the rapid destruction and decimation of organic contaminants.

SPECIFICATIONS

Input Power
  •      •  AC 110V or AC 208~240V (please select the voltage in the optional bar)

UV Lamp



  •      • 
    Solid
     metal double wave mercury lamp
  •      •  UV lamp power:                     55W Max.
  •      •  Wave length:                         254 nm and 185 nm
  •      •  UV Lamp service life:             2500 hrs
  •      •  UV light area:                        100 x 100 mm ( 4"x4")
  •      •  PEAK UV INTENSITIES:     4.6 milliwatts/cm2.


Chamber & Sample Stage




  •      • 
    Overall Dimensions:   9 1⁄2” x 7 7/8” x 6”
  •      •  Drawer Dimensions: 5 1⁄4”” x 51⁄4” x 1”
  •      •  Distance from drawer to lamp: 1 1/16”
  •      •  Distance from pedestal to lamp: 5/16”
  •      •  Borosilicate Glass Pedestal:  4” x 4” x 3⁄4”
  •      •  18 Gauge Steel Chassis and Cover, Powder Coated Finish
  •      •  Timer ranges from 2 min. to 60 min.
  •      •  Total Weight: 9 lbs.

ComplianceCE certified
WarrantyOne-year limited warranty with lifetime support ( no warranty for Pyrex glass chamber )

ENVIRONMENTAL REQUIREMENT

  •      • 
    Indoor Use Only; Altitude Use Up To 5,562 Feet;
  •      •  Temperature Range 41-104 Degrees Fahrenheit;
  •      •  Maximum Relative Humidity 80%, Up To 87 Degrees Fahrenheit Decreasing Linearly to 50%
            Relative Humidity At 104 Degrees Fahrenheit;
  •      •  Main Power Supply Fluctuations Not To Exceed 10% Of The Nominal Voltage; Overvoltage
            Category II;
  •      •  Pollution Degree 2; ozone level (ambient) measurement at <45 ppb.


Application

  •      • 
    Cleaning molecular contamination from SPTs, AFM tips, and surfaces
  •      •  Curing UV-adhesives
  •      •  UV-photopatterning of SAM surfaces
  •      •  Oxidizing PDMS
  •      •  Surface sterilization
  •      •  Etch, pattern, sharpen
  •      •  Clean MEMS devices
  •      •  Clean substrate surfaces such as Si, Ge, GaAs and all oxide crystal  substrate

Consumable Parts
  •      •  Replacement lamps

Shipping Weight & Dimension

  •      • 
    13 lbs
  •      •  15"x14"x12"


Operation Instructions