• 
       •  Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
•      •  Heated by shortwave IR tube lamps for fasting heating
  
•      •  Two heating zones, 195 mm each, total 390 mm in length for HPCVD
  
•      •  The sample holder is slidable in inside retractable bellows, which can achieve fast heating or cool
           under vacuum or controlled atmosphere ( optional)
•      •  Vacuum flanges and the digital vacuum gauge are installed for immediate use.   
  
  

• 
       •  AC 208-240V,  single-phase, 50/60 Hz
•      •  MAX 24 KW, 100 A power supply required.
  
  

• 
       •  16 pcs 1.5 Kw Halogen light tube,  ( Dia. =10mm,  L=390mm )
•      •  Standard working life: 2000 hrs.  ( depends on heating rate )
  
•      •  The halogen light tube is consumable.  Please click the picture left to order spare.

•      •  +/ - 1°C

• 
       •  RT ~ 800ºC: 50  ºC/s
•      •  800ºC ~ 900ºC: 10 ºC/s
  
  

• 
       •  High purity fused quartz tube
•      •  Φ110 (OD) × Φ106 (ID)× 740 (L) mm
  
  

• 
       •  Dual sliding rails made of Cr plated steel
•      •  Sliding rail length: 400 mm
  
  

Temperature Controller 
   
         

• 
       •  Two temperature controllers for controlling two zones independently via SCR
•      •  PID automatic control with up to 30 programmable segments for precise control of heating rate,
          cooling rate and dwell time.
•      •  Built-in overheating & thermocouple broken protection.
•      •  Over-temperature protection and alarm allow for operation without attendant(s).
•      •       •  +/- 1 ºC temperature accuracy.
•      •  RS485 Communications Port.
•      •  PC Control:  
•          º  An MTS-02 control module is included for PC control on this furnace.
•          º  The new version of PC module is now compatible with Lab View 05/08/2014
•          º  A laptop PC can be ordered for $500 together with the furnace. We recommend ordering
              a computer (laptop) from us to avoid software installation problems as we will perform
              installation and testing before shipping. For more information please click here
  
  

Vacuum Flanges

• 
       •  SS water-cooled flanges on the both sides.
•      •  Left flange:
           1/4" thermocouple feedthrough
           1/4'' tube fitting
  
•      •  Right flange:
          KF 25 port with a right angle gate valve for vacuum pump
          Needle valve with barb fitting as a venting port
•      •  A digital vacuum gauge is included
•      •  Retractable bellow design is optional on the left flange, which allows sample retrieving for fast
          cooling under vacuum or inert gas.
  
  

Vacuum Level

• 
       •   Limited by the vacuum pump
•          º  10^-2 torr can be achieved by the mechanical pump
•          º  10^-4 torr can be reached by molecular pump
  
  
•      •  The pump is not included. ( please click the picture below to order )

•      •      
  
  

Water Chiller  (optional)

• 
       •  Cooling water is required for the flange set.
•      •  Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
•      •  We suggest EQ-KJ5000 Series recirculating water chiller as a cooling system
         (please order separately at related products below).
  
  

Dimensions

• 
  1000mm×540mm×800mm
  
  

Net Weight

•      •  ~180 Kg

Shipping Weight

•      •  500 lbs

Warranty

• 
       •  One year limited manufacturer's warranty (Consumable parts such as processing tubes, o-rings,
           and heating elements are not covered by the warranty, please order replacements at related
           products below).
  
  

Laptop, software & WiFi Control (Optional)

• 
       •  Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for
          immediate use.
•      •  Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature
          profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
•      •  A wireless remote control provides up to 300 meters of operating range.
•      •  The above features are available upon request at an extra cost (up to $1,000). Please contact us
           for more information.
•      •  Note:  The software is only compatible with MTI’s Yudian Temperature Controller
  
  

•           
  
  

Compliance

• 
       •  CE Certified
•      •  NRTL(UL61010) or CSA certification is available upon request at extra cost. 
        （ please click marks below to learn details )
  
  

Application Notes


Click here to learn the installation of a gas regulator

• 
       •  Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.12 MPa
          (absolute pressure).
•      •  Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the
          pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
•      •  The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal
           shocks to the tube
•      •  Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used
           up to 1000°C
•      •  Click here to learn how to set up a quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
•      •  Quartz tubes should be replaced after every 10th use to ensure the best performance.
•      •  Samples should never be placed on the tube directly; please order crucibles and boats from here.
•      •  After CVD, the graphene must be transferred from the metal catalyst to another substrate for most
          applications. By using the graphene transfer tape, the residue can below.
  
  

Operation Instructions