RTP Furnaces

 
 
 
Compact 4" RTP Tube Furnace System with Turbomolecular Vacuum Station & Complete Acessories (up to 1E-4 torr & 1100C ) - OTF-1200X-RTP-HV-LD

Compact 4" RTP Tube Furnace System with Turbomolecular Vacuum Station & Complete Acessories (up to 1E-4 torr & 1100C ) - OTF-1200X-RTP-HV-LD

기본 정보
Product Name Compact 4" RTP Tube Furnace System with Turbomolecular Vacuum Station & Complete Acessories (up to 1E-4 torr & 1100C ) - OTF-1200X-RTP-HV-LD
Sale Price Call for Price
Product Code OTF1200XRTPHV4
Quantity 수량증가수량감소
Stock 자세히
상품 옵션
Personalization(Optional Accessory)

 

Product Description

Compact 4“ RTP Tube Furnace with High Vacuum Station & Complete Accessories (up to 10^-5 torr & 1100C ) - EQ-OTF-1200X-4-RTP-HV-UL

OTF-1200X-RTP-4-HV is a UL certifiable compact rapid thermal processing tube (4" I.D.) furnace with High Vacuum Station (diaphragm pump + turbo molecular pump) and KF-D25 vacuum flange assembly. It is designed for annealing semiconductor wafer or solar cell up to 3" diameter. The furnace is heated by 8 units of 1KW halogen light around the processing tube with a max. heating rate of max. 50C/second. 30 segments precision temperature controller is built in with accuracy +/-1° C. RS485 port and control software are included to allow you running furnace and monitoring temperature profile via PC.
 


Furnace
structure
Compact 4“ RTP Tube Furnace(Double layer steel case mullite liner)
Heating element
8 pcs Halogen light tube (D=10 L=300 T =200, mm)

Working Temp.


1100
° C max. (This RTP furnace's max holding time shall be less than 600 seconds at 1000ºC ~ 1100ºC, otherwise O-ring may get melting )

 

Max heating rate50°  C/sec
Max cooling rate64° C/min (Under vacuum: 200 mtorr), 117° C/min (Under atmosphere pressure)
Heating zone
12" length with 4" constant temperature zone within +/-1°C uniformity

Program Temp. Controller













  •      •  PID automatic control via SCR (Silicon Controlled Rectifier) power control with
             phase angle fired, current limiting resistor.

  •      •  30 programmable segments for precise control of heating rate, cooling rate
             and dwell time.

  •      •  Please click here to learn why SCR is more accurate than SSC (Solid state
            relay).


  •      •  Built in PID Auto-Tune function with overheating & broken thermocouple
            broken protection.

  •      •  Over temperature protection and alarm allows for operation without
            attendant(s).

  •      •  +/- 1 ºC temperature accuracy.

  •      •  RS485 Communications Port.

  •      •  PC Control:  

    •          º  A MTS-02 control module is included for PC control on this furnace.

    •          º  The new version of PC module is now compatible with Lab View
                   05/08/2014

    •          º  A laptop PC can be ordered for $900 together with the furnace. We
                   recommend ordering a computer (laptop) from us to avoid software
                  installation problems as
      we will perform installation and testing
                  before shipping
      . For more information please click here.

                       

         


Quartz Tube & Sample Holder


  •      •  Quartz Tube Size: 4.33" O.D x 4.05" I.D x 16.2" Length

  •      •  3" diameter Sample holder is inserted to sliding flange, which is made of
            quartz

  •      •  One 3" diameter AlN wafer is placed in the center of holder for annealing
            sample up to 3" dia.

  •      •  AlN has very high thermal conductivity, which provides the best temperature
             uniformity in the sample area

  •      •  The sample holder is removable from flange


Vacuum flange


KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves.

Sliding flange make an easy way for sample loading. 3" Quartz sample holder.Insert-able thermal-couple for accurate measurement.

 


Water Cooling Jacket


  •      •  Cooling water is required.

  •      •  Please make sure the flow rate of cooling water is ≥ 10L/min, water temp.
            < 25ºC; pressure > 25 PSI.

  •      •  We suggest using the EQ-KJ5000 Series recirculating water chiller as a
            cooling system (please order separately at related products below) to
            save water.  

Warning: This RTP furnace's max dwelling time shall be less than 600 seconds at 1000ºC ~ 1100ºC with tap water, otherwise O-ring may melt. With use of a recirculating water chiller, this holding time can be extended to 1200 seconds.

Flow meter
One flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min
Power input
208-240 AC, 50/60 Hz single phase, 9 KW Max. (> 60A breaker required)

HV Station

High Vacuum Station


Structure


  •      •  Mobile cart size:  600 (L) x 600 (W) x 700(W), mm

  •      •  Max. Loading:       600 Lbs on top

  •      •  Molecular pump control Panel :   LCD digital

  •      •  Diaphragm Pump and  Turbo Molecular Pump are installed inside the steel
            case.

Vacuum Degree
6.3E-5 mbar (with 4" RTP tube furnace in 40 minutes)

Control panel


  •      •  One button operation - the diaphram pump and the turbo molecular pump
             will start after pressing "start" button.

  •      •  System controlled spining speed - the controller will control the speed of
            the turbine spining up and down according to the vacuum level and leaking
            rate of the reaction chamber.

  •      •  Self protection - the system will protect the pump from damage by
             overheating and overcurrect if the leaking rate of the reaction chamber is too
             high to achieve high vacuum.

  •      •  LCD screen - double lines parameters checking interface make the working
            easier to be handled.

           
       Self testing
Spinning up

Start-up time
2 minutes
Backing Pump Volume Flow Rate at 10 mbar
3.8 L/min for 50Hz and 4.4 L/min for 60Hz
Power input
110V AC or 220V AC switchable, 50/60Hz
Power consumption
Duration/Max power: 100/110Watt
Shipping Info
Weight and Dimension
RTP furnace: 110 lbs,  760 x 330 x 530mm (30" x 13" x 21" inch) L x W x H
HV station: 40 lbs,  600 x 600 x 700mm (24" x 24" x 28") L x W x H

Warranty

One year limited warranty with lifetime support
 (Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products below.)


Laptop, software & WiFi Control (Optional)

  •      •  Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.

  •      •  Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile,
            manage heat-treatment recipe, record and plot data for MTI furnaces.

  •      •  A wireless remote control provides up to 300 meters operating range.

  •      •  Above features are available upon request at an extra cost (up to $1,000). Please contact us for more
            information.
  •      •  Note:
           The software is only compatible with MTI’s Yudian Temperature Controller

              


Compliance

  •      •  CE Certified

  •      •  The furnace is ready to pass UL 61010, IEC 61010, SPE-1000 tested by NRTLs at extra cost.
            Please contact us for quote and detail information.

  •      •  Temperature controller is MET and CE Certified

  •      •  High Vacuum Station is TUV Certified

                        


Application Notes


Click here to learn the installation of a gas regulator

  •      •  Tube furnaces with quartz tubes are designed for using under vacuum and low pressure <  0.2 bar / 3 psi /
             0.02 MPa

  •      •  Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C

  •      •  Attention: A two stage pressure regulator must be installed on gas cylinder to limit the pressure to
            below 3 PSI for safe operation.
     
    Click here to learn the installation of a gas regulator.

  •      •  The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the
             tube

Operation Instructions       

Standard package
    Item No.
    Name
    Qty
    Link
    EQ-PV-HVSCompact Turbo molecular Vacuum Pump Station
    1
    EQ-MTS02
    Temperature PC control system (cable and software)
    1
    RTP-ACC-01
    Sample Holder for RTP Furnace
    1
    AIN-Holder
    Aluminum Nitride Substrate for PTP Furnace
    1 pc
    EQ-QZTube-RTP
    Quartz Tube: 4.33" O.D x 4.05" I.D x 16.2" Length for RTP Tube Furnace (installed)
    1 pc
      
    RTP-ACC-02
    Quartz heat shield disk
    4 pc
      
    EQ-RTP-Halogen-light
    Halogen light (heating elements)
    8 pc

    High Temperature Silicone O-ring (Ø108)6 pc

    High Temperature Silicone O-ring (Ø118)3 pc

    20ft.(6m) polyurethane tube O.D. 12mm I.D. 8mm W.P. 100PSI
    1 pc
    KF-Valve-D25
    KF-25 Vacuum right angle valve
    1 pc
    EQ-KF-Clamp-D25Quick Clamp with Rubber O-Ring for KF-D25 Vacuum adapter4 pc
    EQ-KF-Clamp-D40Quick Clamp with Rubber O-Ring for KF-D40 Vacuum adapter3 pc
    RU-KF40-25KF40 to KF25 Reducer Union RU-KF40-25
    1 pc
    EQ-KF-Pipe-D25KF-D25 Flexible Stainless Steel Vacuum Hose ( Bellows ) (1000mm +600mm)
    2 pc
    EQ-CVM-211
    Compact Digital Vacuum Gauge
    1 pc
    RT36-00
    63 A Fuse
    2 pc
      
    RT14-20
    4 A fuse
    2
      


    Optional
      • You must implement cooling water during operation.
      • Please make sure the flow rate  of cooling water >= 3L/min, water temp. < 20oC @ pressure > 25 PSI
      • We suggest you use recirculating water chiller as cooling system (please order separately at the related product below) to save water.
      • You can use flowing tap water as cooling source at flowing rate > 8 Liter/minute.
      • Warning 1: With the normal tap water as cooling source, this RTP furnace's Max holding time shall be less than 600 seconds at 1000oC ~ 1100oC, otherwise O-ring may get melting.
      • Warning 2: With the recommended recirculating water chiller as cooling system, this RTP furnace's Max holding time can last 1200 seconds at 1000oC ~ 1100oC, otherwise O-ring may get melting.
      • Optional for upgrade:  You may choose our gas mixer to replace mobile cart  for better gas control- ( please order at the the related product below)

                        
                 Water cooling chiller                          Gas mix station