•3" wafer boat is made of ultra-high purity quart (4N purity) with 1200 oC working temperature •Can carry 25 piece wafers of 3" diameter x 0.5 mm thickness in each boat •Design for diffusion, oxidation and annealing 3" Si wafer •Can fit in MTI OTF1200-4 tube furnace
Cross section drawing of 3" quartz boat in mm (length 180 mm )
3" wafer with quartz boat can be place into 4" tube
