GSL-1100X-11-III furnace is a CE certified three zone tube furnace with 11"O.D quartz tube and vacuum flanges. Needle valves and, vacuum gauge are pre-installed for immediate use. Three 30 segment programmable controllers are built in with K type thermal couple. Microprocessor-based PID control provides excellent control without overshooting and +/- 1 ºC accuracy. It has been widely used for materials or chemical lab for sintering all types of new material samples under vacuum or other gases conditions. It is an excellent tool for annealing, diffusing and sintering processes.
•Double layer steel casing with air cooling. Surface temperature of case is < 70 °C. •Refractory fibrous alumina insulation liner for maximum energy saving. •Heating element : NiCrAl Resistance Wire •Two fibrous ceramic tube blocks are included for blocking heat radiation from inside tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating) •Quartz blocks (Optional) are available upon request for more clearness and higher vacuum processing (check the pic below) •This furnace can be used as annealing or diffusion furnace for 8" wafer use a quartz boat at related product below
•Total heating zone length 900 mm (36") •Three zones : 300 mm + 300 mm + 300 mm (12" per zone) •Constant temperature zone : 500 mm (if three zones are in the same temperature)
Working temperature
•Max heating temperature : 1100 °C ( < 1 hour ) •Normal working temperature : 200 ~ 1000 °C •Max heating & cooling rate : 10 °C/min •Temperature uniformity : please click the pic to enlarge
Temperature control
•Three digital controllers with PID/self-tuning functions and 30 segments programmable. •Thermocouple : three K type thermocouples (one for each zone) •Control accuracy : +/- 1 °C •Software for PC control is available as optional ( click picture below to order )
Vacuum sealing & Flange
•A pair of stainless steel vacuum sealing flange (Hinged Type) and 4 pieces of high temp-resistance silicon O-ring are included in order to achieve the vacuum rate of 10-2 torr via heavy duty mechanical pump. •Left Side Flange : Vacuum gauge, stainless steel needle valves and 1/4" barbed hose fitting. •Right Side Flange : KF40 vacuum port with KF-40 Vacuum Right-Angle Valve for easy connection to KF40 bellows and pump. ( If use pump with KF25 port, you will need a adapter KF40-KF25. •One 1/4" OD thermal couple insert port is built in the flange for easy temperature calibration.
Calibration (Optional)
•The tube furnace should be calibrated regularly to maintain the temperature accuracy and uniformity. We are providing a simple calibration kit for you to complete this job at extra cost The complete calibration kit includes (click the underline to see details):
•Single Phase,220V AC,50/60 Hz •AWG 8# Power cord is included (without plug)
Power consumption
Max. 8 KW (50A breaker required)
Product Dimension
•1300 L x 680 W x 920 H mm (51" L x 24.5" W x 37" H) (without the vacuum flange) •1670 L x 680 W x 920 H mm (66" L x 24.5" W x 37" H) (with the vacuum flange and right angle valve)
Net weight
200 kg
Shipping dimension
70" x 70" x 65"
Shipping weight
500 Lbs (227 kg)
Warranty
•One year limited warranty for electrical parts. (Consumable parts such as processing tubes, o-rings and quartz tube are not covered by the warranty) •You may order replacement quartz tube at the link below
Compliance
•CE Certified •UL / MET / CSA Certification is available upon request, additional charges will apply •Temperature controller is MET and CE Certified
