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ZnO Substrates -- M Plate
ZnO (1-100) M-plane 5x5x0.5mm, 2sp
- Size
- 5 mm x 5 mm x 0.5 mm
- Orientation
- (1-100) +/- 0.5 o, M-plane
- Polish
- two sides polished.
- Packed in 1000 class clean room with 100 class plastic bag
- Impurity : wt%
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•Mg : < .0005
•Al : < .0030
•Si: 0.0030
•Ti : .0010
•Cu : < .0030
•Fe : < 0.005
•Ca : < .0005
•Ag : < .0002
- Crystal Structure
-
Hexagonal : a = 3.252 Å, c = 5.313 Å
- Growth Method
- Hydrothermal
- Specific heat
- 0.125 cal/gm
- Thermoelectric Constant
- 1200 mV /oK @ 300 oC
- Thermal conductivity
- 0.006 cal/cm/oK
- Thermal expansion
- 2.90 x 10-6/oK
- Transmission range
- 0.4 - 0.6 m > 50% at 2 mm
- Dislocation Density
- <0001> plane <100 / cm2
- Availability of Standard Substrate
- Polished surface
- EPI polished on one side or two sides to Ra < 10 Å
- Standard Size
- 10 x 10 mm , 5 x 5 mm and 20 x 20 mm
- Thickness
- 0.35 mm, 0.5 mm and 1.0 mm
- Special Orientation is available upon request
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