•1" wafer boat is made of ultra-high purity quart (4N purity) with 1200 oC working temperature •Can carry 25 piece wafers of 1" diameter x 0.5 mm thickness in each boat •Design for diffusion, oxidation and annealing 1" Si wafer •Can fit in MTI OTF-1200X-S50 tube furnace (2" tube furnace)
1" wafer with quartz boat
1" wafer with quartz boat can be place into 3" tube furnace