This is a 6'' O.D conflat flange with universal type high vacuum feedthrough (0.75" ID and 1" OD) installed.
It is compatible with MTI or other brand sputtering heads with 3/4" rod at related products below.
Specifications
Material
304 Stainless Steel
Structure
•Standard 6" CF flange with cener hole. •1'' through hole flange, 16 un-threaded bolt holes, bolt hole diameter 0.33''. Please click the Pic1 & 2 for details. •High Vacuum Feedthrough with quick connectoe is installed in the center of the flange 0.75'' I.D, 1'' O.D, for insrtalation of standard sputtering gun ( please click Pic3 & 4 for details )
Pic.1
Pic.2
Pic.3
Pic.4
Vacuum level
10 -6 torr via suitable turbo pump
How to use
Insert the sputtering head with 3/4“ rod thourgh the high vacuum feedthrough on the CF flange.
Adjust the height of the sputtering head in the vacuum chamber.
Tighten the Quick Connect to fix the position of the Sputting head.
The installation can be completed within 10minutes without the use of special tools or welds.
