• Sapphire substrate is the popular substrates for III-V nitrides, superconductor and magnetic epi film due to less mis-matched lattice and stable chemical and physical properties.
• Wafer size: 10 x 10 x 0.1 mm thick
• Orientation: <0001> +/-0.5o
• Polished surface: substrate surface is EPI polished via a special CMP procedure with RA < 5 A
• one side polished
• Package: Each wafer is packed in 1000 class clean room with 100 grade plastic bag with wafer container