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Diamond on Silicon wafer
Diamond on Silicon Wafer(DOS), 5x5mm , 2 um Thick, 10 nm Ra
- Silicon wafer Orientation
- (100) +/- 0.5o
- Diamond film thickness
- 2 micron
- Resistivity
- 10E3 ~ 10E4 ohm-cm
- Surface Roughness
- one sides CMP polished with surface roughness < 10 nm
- Package
- One 1000 class clean room with 100 class plastic bag
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Working days : Monday to Saturday
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