Features | • Precision Polishing Jig for accurate wafer / substrate polishing and back-thinning- • Thickness control screw fixture with resolution of 0.005 mm to limit stock remove
- • This Polishing fixture can be fit with Unipol 1202 and 1502 and any precision 12" or larger polishing machine
with York support to achieve automatic polishing or lapping. - • Super-hard tungsten alloy is weld on the bottom of jig for polishing resistible
- • Maximum sample thickness: 13mm
- • Maximum travel distance: 14mm
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Sample Holder Vacuum chuck | • Maximum size of wafer or substrate is 4"- • If the thickness of the sample is greater than 0.15 mm, adopt vacuum absorption. If the thickness is less
than 0.15 mm, use wax.
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Digital Micrometer | • One digital micrometer is included with the resolution of +/- 1 micron for more accurate lapping.
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Pressure Indicator | • One digital balance is included for measuring the fixture weight ( pressure ) - • Weight can be adjusted by screws while measuring on the digital balance from 1g to 2000g.
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Vacuum Absorption and Filter
| • Require a vacuum pump with rate > 70 L/ min.- • To protect the vacuum pump from any moisture and liquid, connect the filter between fixture and pump.
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Size | O.D: 146mm; Height: 266mm |
Operational Instructions |
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Application Notes | Please clicks on here to download how to use this fixture. |
Optional Accessories | A vacuum pump required for vacuum absorption, please order separately.
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