Features |
• Precision Polishing Jig for accurate wafer / substrate polishing and back-thinning- • Thickness control screw fixture with resolution of 0.005 mm to limit stock remove
- • This Polishing fixture can be fit with Unipol 1202 and 1502 and any precision 12" or larger polishing machine
with York support to achieve automatic polishing or lapping. - • Super-hard tungsten alloy is weld on the bottom of jig for polishing resistible
- • Maximum sample thickness: 13mm
- • Maximum travel distance: 14mm
 
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Sample Holder Vacuum
chuck |
• Maximum size of wafer or substrate is 4"- • If the thickness of the sample is greater than 0.15 mm, adopt vacuum absorption. If the thickness is less
than 0.15 mm, use wax.
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Digital Micrometer |
• One digital micrometer is included with the resolution of +/- 1 micron for more accurate lapping.
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Pressure Indicator |
• One digital balance is included for measuring the fixture weight ( pressure ) - • Weight can be adjusted by screws while measuring on the digital balance from 1g to 2000g.
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Vacuum Absorption and
Filter
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• Require a vacuum pump with rate > 70 L/ min.- • To protect the vacuum pump from any moisture and liquid, connect the filter between fixture and pump.
 
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| Size | O.D: 146mm; Height: 266mm |
Operational Instructions |
 
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| Application Notes | Please clicks on here to download how to use this fixture. |
Optional Accessories |
A vacuum pump required for vacuum absorption, please order separately.
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