| Working Voltage | 110V AC / 220V AC selectable |
Structure |
• Heavy duty Aluminum casting case to keep spinning stable- • 110VDC motor
- • Can not be used under Ar gas
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Spin Plates
|
• Chamber size is the 134mm diameter, can accept wafer sample 4" diameter at Max.- • Two 4" stainless steel spin plates are included, which can hold one or multiple samples by wax
or double-sided tape - • Please click here to learn how to mount samples on the plate by using removable double-sided
tape. It is easy and more economical than vacuum chuck。 - • One roll of 3M removable double-sided tape (3/4' W x 400" L) is included for immediate use
(please click the picture below to see specs and order spare tape) - • You may order a wafer bonding tape to stick large substrate to the spin plate by click the
pictures below:
  
Note: you may use double layer tape ( 0.5mm total), then cut any size of hollow to put the substrate inside the hollow
|
Optional vacuum-free sample holder |
• The vacuum-free sample holder is available upon request at the extra cost of $200
- • Customized spinning discs and templates are available upon request
   
|
| Optional | - • You may order EQ-ECO-419-LD
|
Spin Speed & Time
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• Digital control panel with TWO programmable segments for different spin times and speeds- • Spinning speed: 500 - 8000 RPM
- • Spinning Time: 1 - 60s
|
Liquid Injecting |
• One 20 mL syringe is included for liquid injection
- • Support rod and swing arm for the injector is included for easy coating
- • The syringe holder height can be adjusted and rotated freely along the support rod
|
Optional | |
Product Dimensions
| 13''(L) x 10''(W) x 7''(H)
|
| Net Weight | 30 lbs |
Compliance |
• CE certificated only- • If you need NRTL certification, please order VTC-100PA ( click pic below )
|
Warranty
|
• One year limited with lifetime support
- • Rusting and damage due to improper storage condition or maintenance are not covered by
warranty
|
Operation Video & Instructions |
  
|
Application Notes |  
click the picture to choose vacuum chunk spin coater
|
Warnings |
• Do not overflush the water bowl/base with any kinds of liquid. Excess liquid will leak into the
motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the
bow/base.- • If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid
overflowing during the operation. - • For more details about the cleaning procedure, please review the cleaning instruction for the spin
coaters.
|
| Shipping Dimensions | 20"(L) x 15"(W) x 20"(H) |
| Shipping Weight | 60 lbs |
