Spin Coaters

Compact Spin Coater (8000 rpm, 4" wafer Max.) w/ 3 Vacuum Chucks & Vacuum Pump - VTC-100A 부과세 별도

Compact Spin Coater (8000 rpm, 4" wafer Max.) w/ 3 Vacuum Chucks & Vacuum Pump - VTC-100A 부과세 별도

기본 정보
Product Name Compact Spin Coater (8000 rpm, 4" wafer Max.) w/ 3 Vacuum Chucks & Vacuum Pump - VTC-100A 부과세 별도
Sale Price Call for price
Product Code VTC-100A
Quantity 수량증가수량감소
Stock 자세히
상품 옵션
Product Options( power supply)

 
VTC-100A is CE certified compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 4". The spinning speed is variable from 500-8000 rpm with two programmable segments. The package comes included with complete accessories for immediate use.
 

SPECIFICATIONS:


Structure
                   

  •      •  Aluminum casting case to keep spinning stably
  •      •  The liquid disk made of Polypropylene (PP) to resist most of the corrosive solutions
  •      •  Drainage outlet and vacuum pump connector are on the back panel
  •      •  One filter is included in the standard package. It is used to connect the coater for preventing
            wastewater flowing into the pump
  •      •  One oil-less vacuum pump is included in the standard package, please click here for
            specification details.



Chamber  & Vacuum Chuck



  •      •  Chamber Diameter: 145 mm
  •      •  3 sets of PP anti-corrosive vacuum chucks with chuck o-ring come in different sizes
            (1'', 2'' and 4'')
  •      •  1 piece of adhesive tape (6'' W x 24'' L) is included  for coating irregularly shaped substrates
            (e.g. Place the irregular substrate on the adhesive tape, then the vacuum chuck will hold the
             tape by suction)
  •      •  Mini suction cups are available for the small wafer with less 1" Dia. or substrate with regular  
            ( 5x5, or 10x10mm) or irregular shape.
    Please click here to order. at extra cost.
            ( see picture below right )


                                         
                 (Optional; click pic to see demo video)


Vacuum Pump
   


Spin Speed & Time


 

  •      •  Digital control panel with TWO programmable segments for different spin times and speeds
  •      •  Spinning speed: 500 - 8000 RPM  
  •      •  Spinning Time: 1 - 60s


Liquid Injecting


  •      •  20mL syringe is used to contain the coating material
  •      •  The syringe holder height can be adjusted and rotated freely along the support rod

                    - Pic 1   - Pic 2     


Optional

  •      •  You may choose Precision Electronic Single Channel Pipette: for more accurate coating
            (Click Pic 1)
  •      •  Using plasma cleaner to treat substrate surface before the coating can improve film quality
  •      •  You may consider our new product: Heatable syringe (Click Pic 4)

                 - Pic 1    - Pic 2    - Pic 3    - Pic 4    

Input Power110VAC or 220VAC please select the voltage in the options bar (10A fuse)
Motor Power24V DC motor with 150W Max.

Product Dimensions


13''(L) x 10''(W) x 8.5''(H)

Net Weight15 kg (33 lbs)

Compliance


  •      •  CE certificated only
  •      •  If you need NRTL certification, please order  VTC-100PA ( click pic below )

            


Warranty

  •      •  One year limited with lifetime support
  •      •  Rusting and damage due to improper storage condition or maintenance are not covered by
             warranty



Operation Manual & Video

        


Application Notes

  •      •  Please clicks here to review an article on "Spin Coater Theory and Processing"
  •      •  In order to achieve optimal coating quality, please consider cleaning substrates by a plasma
            cleaner (click the pictures below for more details) prior to coating. This will significantly reduce
            the surface tension on the substrates.

  •      •  Cleaning instruction for the spin coaters.
  •      •  You may consider our new product: Heatable syringe and spin coater with heatable cover
  •      •  Strongly suggest you put the coater under a fume hood as below right
  •      •  When using the coater in the glovebox with Ar gas, the vacuum pump must put in outside the
             glovebox via vacuum feedthrough or adaptor


                      


Warnings

  •      •  Do not overflush the water bowl/base with any kinds of liquid. Excess liquid will leak into the
            motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the
             bow/base.
  •      •  If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid
            overflowing during the operation.
  •      •  For more details about the cleaning procedure, please review the cleaning instruction for the
           spin coaters.


Shipping Dimensions40"(L) x 28"(W) x 24"(H)
Shipping Weight85 lbs


STANDARD PACKAGE:
Item #DescriptionQty
1VTC-100A Desktop Spin Coater1
24" Vacuum Chuck (pre-installed on the machine)1
32" Vacuum Chuck1
41" Vacuum Chuck1
5Plastic Glass Cover for operation safety (pre-installed on the machine)1
620mL Syringe for dropping coating solvent on the plate1
7Hose for connecting the vacuum pump1
8Drain Hose for water outlet1
9Oil-less vacuum pump, AC 110V or 220V version with Filter installed on the pump as a whole set
(connect to vacuum pipe to keep water from flowing into the pump)
1
10Blue Adhesive Tape (6" W x 24" L)
1
Optional Parts
OptionChuck O-ring For VTC200 OR VTC100Option