Spin Coaters

Anti-Corrosion Spin Coater ( 8000 RPM & 6" wafer Max.) with Complete Accessories - VTC-200P

Anti-Corrosion Spin Coater ( 8000 RPM & 6" wafer Max.) with Complete Accessories - VTC-200P

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Product Name Anti-Corrosion Spin Coater ( 8000 RPM & 6" wafer Max.) with Complete Accessories - VTC-200P
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Product Code VTC-200P
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VTC-200P is Anti-Corrosion Spin Coater made of  Polypropylene (PP) material, which can be used for active acidic or alkali solution, especially suitable for use inside glovebox under Ar gas.   4'' dia. vacuum chuck is included for coating wafer upto  6".  The digital control box is separated from spin coater which allows you operate in the remote location. The spinning speed is variable from 500-8000 rpm with two programmable segments. The package includes the oilless vacuum pump and 20ml syringe for immediate use. 



SPECIFICATIONS:


Structure

 

  •      •  Case and spin disk made of Polypropylene (PP)
     to resist most of the corrosive solutions.
  •      •  Digital control box is separated from spin coater.
  •      •  One filter is included in standard package. It is used to connect the pump and coater for
            preventing waste water from flowing into the pump.
  •      •  One oil-less vacuum pump is included in the standard package; please click here for
            specification
     details.


Input Power

  •      •  Default 220VAC, 50/60Hz,  single phase, 1000W Max.
  •      •  110V is available in optional bar ( with 1500W transformer )
  •      •  A power socket on the back of the Digital control box is used to supply power to the vacuum
            pump. (The output voltage of this power outlet depends on the input voltage of the spin coater,
            e.g. if the spin coater is plugged into AC 110V, this power socket will supply AC 110V.)




Chamber  & Vacuum Chuck

  •      •  Chamber diameter:  150 mm
  •      •  PP anti-corrosive vacuum chuck Φ100mm, which can hold substrate upto 6" Dia.
            ( see bottom left picture)
  •      •  If your sample < 10 mm, please order rubber cup from us at extra cost
            ( click picture bottom right )
                       


Vacuum Pump

  •      •  One 120L/min Oilless Vacuum Pump is included in the standard package, please click the
             picture below for specification details. (Pic.1)
  •      •  For Ar glove box user, we recommend our 24VDC vacuum pump for simple pump and coater
            connection with no feedthrough required. (Pic.2)

  •            


Spin Speed

  •      •  Digital control panel with six programmable segments of different spin times and speeds
  •      •  Maximum programmable spin time 6*60s = 360s
  •      •  500 - 8000 RPM adjustable spinning speed  at each segment


Liquid Injecting



  •      •  20mL syringe is used to contain the coating material (Click Pic 1)
                    - Pic 1      



Optional



  •      •  You may choose Precision Electronic Single Channel Pipette: 20 - 200uL for more accurate
            coating (Click Pic 1 & 2 )
  •      •  Using plasma cleaner to treat substrate surface before coating can improve film quality
  •      •  You may consider our new product: Heatable syringe (Click Pic 3)     
             
     - 
    Pic 1    - Pic 2    - Pic 3 

  •      •  Heating cover with digital temperature controller up to 120 ℃ is available upon request at
            extra cost ($1950), which allow sample drying in-situ during and after coating (Click Pic 4 & 5)
  •      •  Vacuum Flash Assembly for DIY Vacuum Flash-Assisted Solution Process (VASP), Up to 5
            mTorr
     is available ( Pic 6)  
  •      •  Vacuumable spin coater with digital gauge is available ( Pic. 7)
  •      •  The EQ-OFDP-2 is a tiny silent powerful diaphragm pump made in Germany and provides 
  •          an excellent vacuum performance, $1455 extra cost.
                     - Pic 4         - Pic 5      - Pic 6  
                     
 Pic 7 Pic 8

Motor 24VDC, Brushless,  200W max.:

Product Dimensions

 


Spin Coater:       25.2cm(Φ) x 41cm(H)
Digital controller: 23cm(L) x32cm(W) x16cm(H)
Net Weight25 kg

Compliance

  •      •  CE Certified
  •      •  NRTL certification is available upon request at extra cost
            ( Please notice us before ordering if you need NRTL )



Warranty

  •      •  One year limited with lifetime support
  •      •  Rusting and damage due to improper storage condition or maintenance are not covered by
            warranty



Operation Manual & Video
 
     

          


Application Notes

  •      •  Please clicks here to review an article on "Spin Coater Theory and Processing."
  •      •  To achieve better coating quality, please consider cleaning substrates by plasma cleaner
            before coating
  •      •  The EQ-OFDP-2 is a tiny silent powerful diaphragm pump made in Germany and provides
            an excellent vacuum performance; now
     it's only $1455 for you to have this pump.
  •      •  You may consider placing the spin coater into a small glove box and coat under inert gas
            atmosphere
  •      •  Cleaning instruction for the spin coaters.
  •      •  This spin coater is suitable for using Argon atmosphere inside glovebox

  •                               


Warnings

  •      •  Do not overflush the water bowl/base with any kinds of liquid. Excess liquid will leak into the
            motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the
            bow/base.
  •      •  If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid
            overflowing during the operation.
  •      •  For more details about the cleaning procedure, please review the cleaning instruction for the spin
            coaters.


Shipping Dimensions40"(L) x 30"(W) x 30"(H)
Shipping Weight46 kg (100 lbs)


STANDARD PACKAGE:

Item #DescriptionQty
1VTC-200P Desktop Spin Coater1
2Digital control box1
34" ( 100mm) Vacuum Chuck1
420mL Syringe for dropping coating solvent on the plate1
5500mm Hose for connecting vacuum pump2
6Filter (connect to vacuum pipe to keep water from flowing into pump)1
7Oil-less vacuum pump1
8Blue Adhesive Tape (6" W x 24" L)
1
9Spin disk wrench1