Features
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• Made of high-quality materials of stainless steel and ceramics. - • Electromagnetic finite element calculations are used in the design of the permanent magnetic assembly
to achieve high field strength and uniform field profile. - • The magnet is coated with protective material against cooling water corrosion to maximize durability.
- • Standard RF connector, which matches with a wide range of DC and RF sputtering power supplies.
- • The low impedance sputtering heads are easily interfaceable with an external power supply.
- • Easy to install a standard fitting with included quick connector
- • Target replacement is easy and no need to adjust the gun to fit targets with different height.
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Power Requirement |
• DC (Max.) 2000 W- • RF (Max.) 1000 W
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Electrical Connection Type
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• Standard HN Female Connector is included (DC and RF, Picture below left )- • Optional SL16 cable Connector ( Picture below right)
- • 148 cm RF cable is recommended with extra cost (click Pic. right 1 to order)
  
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| Sputtering Current (Max.) | 3 Amp |
| Sputtering Voltage | 100-1000 V |
| Sputtering Pressure | 3 - 50 mTorr |
| Operating Temperature | 10 - 100oC |
Sputtering Uniformity Curve |
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Dimensions |   
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Sputtering Target |
• Diameter: 4.0" - • Thickness: up to 1/8" for non-magnetic target; up to 1/16" for magnetic target
- • Utilization: up to 30%
- • Magnet: NdFeB Rare Earth Magnet
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Cooling Water Requirement |
• Flow Rate: 2.0 GPM- • Water Inlet Temperature: <20 C
- • Water tubing: 0.25" O.D.
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| Mounting | - Feedthrough: 3/4" O.D.tube
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| Net Weight | 3.5 lbs |
Accessories
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• High vacuum Quick connector with 0.75" ID is included. Use this component to install the sputtering
source onto the baseplate (up to 1” thick) of a vacuum chamber with 1” diameter through-hole at easy
(click pic below left to see detail )- • Digital Temperature Controlled Circulating Water Chiller with 6 Liters Tank, 16L / min Flow is available
at extra cost, please click picture below right to order.
  
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Operation Instructions | |
| Warranty | One year limited with lifetime support |
