| Input Power | - • 220VAC, 50/60Hz or 110VAC, 60Hz selectable
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RF Power Generator
with auto-matching |
• Output Power: 5 -300W adjustable with ± 1% stability- • RF frequency: 13.56 MHz ±0.005% stability
- • Matching: Automatic with variable air capacitor
- • Cooling: Air cooling
- • Noise: <50 dB
- • Power: 110 -240VAC, 50/60Hz
- • Dimension: 400 W x 450 D x 80 H, mm
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| Dimension |    |
Optional Accessories
Click here to order
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• You may order 2" High Vacuum Magnetron Sputter Source For DIY RF & DC Sputtering
Coater together with RF power supply for immediate use- • High Vacuum Quick Disconnect is included when you order 300W RF generator together with
the 2" sputtering source. - • High Vacuum Quick Disconnect with 0.75" ID (compatible with HVMSS-SPC-2). Use this
component to install the HVMSS-SPC-2 sputtering tool onto the baseplate (up to 1” thick) of a
vacuum chamber with 1” diameter through-hole - • Digital Temperature Controlled Circulating Water Chiller with 6 Liters Tank, 16L / min Flow is
available at extra cost, please order separately. - • 148 cm RF cable is recommended with extra cost (click Pic. right 1 to order)
    
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Operation Instructions | |
| Warranty | One year limited with lifetime support |
