Furnace Structure
| Single heating zone
- • High purity Al2O3 insulation chamber
guarantees excellent temperature uniformity. - • Cooling fans are installed at the bottom of the
furnace to ensure efficient ventilation. - • Sliding flange assembly is made of stainless
steel. - • Dual quartz tube:100mm Dia. exterior
tube and suspended by 80 mm Dia. interior tube. Metallic foil (Graphene Growth Substrate) will be wrapped around inside tube surface for CVD reaction - • Heating zone length: 440mm
Constant temperature heating zone length: 120 (±1°C) @400~1100°C
| Dual heating zone
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Power
| Single heating zone Power: 208-240VAC, 50/60Hz, single phase, 2.5KW ( 20A Breaker required)
| Dual heating zone Power: 208-240VAC, 50/60Hz, single phase, 4 KW ( 50A Breaker required) 10 feet power cable with no plug (ask a licensed electrician to do the plug)
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Heating Temperature | • Max. Temperature: 1100°C- • Continuous Temperature: 1000°C
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Heating & Cooling Rate
| Max. heating and cooling rates depend on working temperature. Please click on tables below to see the Max. heating & cooling rate varies at different temperature range. ( You shall calibrate temperature and heating cooling rate at your working condition before use )
Heating plot Cooling plot |
Fused Quartz Tubes | |
Vacuum Flanges
| Using dual tube for inducing CVD growth on metal foil (wrapped around interior tube surface):
Please click for a related article: "Roll-to-roll production of 30-inch graphene films for transparent electrodes "
- • 1-1. Shown below, one pair of SS304 flanges to seal both the outside tube and the space between the outside
tube and inside the tube (this space is considered as a reaction chamber). - • 1-2. Leave both ends of inside tube open for gas cooling.
| | | | | | Left flange (click to enlarge) | Right flange (click to enlarge) |
Ultimate vacuum pressure: 10^-2 torr (by mechanical pump) 10^-5 torr (by turbo molecular pump)
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Temperature Controller
| • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.- • Built-in over temperature alarm and protection allows for operation without any attendant.
- • Over temperature protection and alarm allows for operation without attendant(s).
- • +/- 1 ºC temperature accuracy.
- • RS485 Communications Port.
- º Advanced Temperature Control (Optional)
- º MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package
is available at the options bar. Click for the detail information about the MTS02-Y software kit.
- º You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which
is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller.
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Mass Flow Meters & Gas Mixing Station
| • 4 precision mass flow controller ( MFC) with digital display and adjusting knob are installed on the left bottom case to control gas flow rate:- • 4 Gas channels (contact MTI sales if need more)
- º MFC 1: Control range from 0~100 SCCM
- º MFC 2: Control range from 0~200 SCCM
- º MFC 3: Control range from 0~200 SCCM
- º MFC 4: Control range from 0~500 SCCM
- • Flowing rate accuracy: ±1% FS
- • Gas inlet and outlet: 1/4" Swagelok tube connector
- • One 80mL gas mixing tank is installed in bottom case
- • Each gas channel has a stainless steel needle valve for easy on/off
- • The flow rate is adjustable from the MFC panel
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Vacuum Pump Station and valves
| Optional 1:
| Optional 2: |
Water Cooling Function | Water cooling on the flange is mainly for cooling down the o-ring inside the flange to ensure the best-sealed chamber at high temperature:
- • Water cooling flanges require >= 10L/M water flow.
- • You may use tap water as the coolant, but we strongly suggest you to use a recirculating water chiller for
environmental considerations. Please click thumb below to order the water chiller at extra cost.
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Optional Parts (building up a single tube furnace) | You can build up an 80mm Dia. single tube reaction chamber by ordering extra sealing flanges and install them onto interior tube: (click to enlarge the picture) click here to choose a crucible
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Dimension | • Furnace: 550 x 380 x 520mm- • Bottom mobile case x 2: 600 x 600 x 600mm (one for gas mixing station and the other for vacuum pump)
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Shipping
| • Shipping Weight: ~800 lb- • Shipping by freight with three pallets
- • Crating fee will be applied
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Warranty
| One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
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Laptop, software & WiFi Control (Optional) | |
Compliance
| • CE Certified- • All electric components ( >24V) are UL / MET / CSA certified
- • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.
( please click marks below to learn details )
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Application Notes
Click here to learn the installation of a gas regulator
| • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa- • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the
pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. - • The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks
to the tube - • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
- • Click here to learn How to set up quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
- • One slide stopping clamp is included for holding the position of the furnace.
- • After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications.
By using the graphene transfer tape, the residue can be low.
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Warning | Fast sample cooling can be achieved by sliding the heating chamber away. Please wear protective gears such as heat resistant suit & gloves if you intend to do so. DO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT!
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Operation Instructions | (Operation and Installation Video) (Furnace-Sliding Test Demo)
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