Control Pannel
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• All parameters of ALD vapor puls time , and Gas flow are controlled by PLC via a 6" touch screen
panel in a mobile cart - º Control Two ALD valves with puls duation time and cycling with mico-second precision
- º Control For channels gas delivery with ±0.2%F.S via MFC
- º Display vacuum pressure
- º Other parameter upon request of customer
- • Please click picture below to see control interface
 
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ALD valve
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• Two ALD valves with pulse controller (min 10 ms duration )- • Capable of heating with thermal actuators
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Liquid-Vapor Generator
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• Automatic liquid vapor generator is included and connect to ALD valve
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Dual Zone Split Tube furnace
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• Max 1100ºC for continuous heating- • Two programmable precision digital temperature controllers with 30 segments.
- • Two separate controlled Heating Zones
- º 200mm length for each heating zone
- º 400mm total in heating length
- º 250mm constant central temperature heating area if both zones were heated at the
same temperature - º 500ºC max temperature difference between two zones with thermal blocks in between
- • Input power: 208 – 240V AC input, single phase at max. 4KW
- • Optional: ALD control system can be installed with a short tube furnace or rotation tube furnace
as picture below
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Anti-corrosive Pressure Gauge
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• 3.8x10-5 to 1125 Torr measurement range- • Anti-corrosive, gas-type independent
- • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
- • Fast atmospheric detection eliminates waiting time and shortens process cycle
- • Easy to exchange plug & play sensor element
- • Click the picture to view detail spec.
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Vacuum Pump
( optional)
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• 10E-2 Torr vacuum can be achieved inside processing tube- • Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture below
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More Bubbler
Optional
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Update Idea |
• You may use ALD Device to build hybrid Plasma enhanced ALD+ CVD and ALD+PVD+CVD system
to grow complex materials and Powder ALD with rotation furnace
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 ( PE-ALD+CVD)  ( PE-ALD+PVD +CVD)
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Warranty
| One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below). |
Compliance
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• Built-in Pfeiffer's pump is ELT Certification- • CE Certified
- • All electric components ( >24V) are UL / MET / CSA certified
- • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.
（ please click marks below to learn details )
 
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Application
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Operation Insturctions | |
